Mechanical stability and handling-induced failure of micromachined wafers for RF applications

2001 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 2001

Volumn , Issue , 2001, Pages 102-109

  Polyakov, A ^a   Bartek, M ^a   Burghartz, J N ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Geometry; Mechanical variables measurement; Micromachining; Performance evaluation; Radio frequency; Radiofrequency identification; Silicon; Smoothing methods; Stability; Stress

Indexed keywords

COMPOSITE MICROMECHANICS; CONVERGENCE OF NUMERICAL METHODS; FAILURE (MECHANICAL); FRACTURE; GEOMETRY; INTEGRATED CIRCUITS; MECHANICAL STABILITY; MECHANICAL VARIABLES MEASUREMENT; MICROMACHINING; MONOLITHIC INTEGRATED CIRCUITS; RADIO FREQUENCY IDENTIFICATION (RFID); SILICON; STRESSES;

CONVENTIONAL EQUIPMENT; ENABLING TECHNOLOGIES; MECHANICAL CHARACTERISTICS; MECHANICAL FAILURES; MICROMACHINED STRUCTURES; PERFORMANCE EVALUATION; RADIO FREQUENCIES; SMOOTHING METHODS;

SILICON WAFERS;

EID: 80054911959     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMIC.2001.942349     Document Type: Conference Paper

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