Optical properties of grooved silicon microstructures: Theory and experiment

Journal of Experimental and Theoretical Physics

Volumn 113, Issue 1, 2011, Pages 80-85

  Dyakov, S A ^a,b   Astrova, E V ^c   Perova, T S ^b   Tikhodeev, S G ^d   Gippius, N A ^d   Timoshenko, V Yu ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

^b TRINITY COLLEGE DUBLIN   (Ireland)

^c IOFFE INSTITUTE   (Russian Federation)

^d PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

AIR CHANNELS; EFFECTIVE MEDIUM MODEL; EFFECTIVE REFRACTIVE INDEX; IMAGINARY PARTS; INCIDENT LIGHT; IR SPECTRAL RANGE; LONG WAVELENGTH; LONG-WAVELENGTH APPROXIMATION; REFLECTION SPECTRA; SCATTERING MATRIX METHOD; SILICON LAYER; SILICON MICROSTRUCTURES; SILICON STRUCTURES; SILICON WALLS; SPECTRAL RANGE; SPECTRAL REGION;

LIGHT REFRACTION; REFRACTIVE INDEX; REFRACTOMETERS; SCATTERING; SCATTERING PARAMETERS;

MICROSTRUCTURE;

EID: 80054749699     PISSN: 10637761     EISSN: None     Source Type: Journal    
DOI: 10.1134/S1063776111060161     Document Type: Article

References (20)

1. E. V Astrova, T. S. Perova, V A. Tolmachev, A. D. Re-menyuk, J. Vij, and A. Moore, Fiz. Tekh. Polupro-vodn. (St. Petersburg) 37 (4), 417 (2003) [Semicon-ductors 37 (4), 399 (2003)].
2. E. Yu. Krutkova, V. Yu. Timoshenko, L. A. Golovan, P. K. Kashkarov, E. V. Astrova, T. S. Perova, B. P. Gor-shunov and A. A. Volkov, Fiz. Tekh. Poluprovodn. (St. Petersburg) 40 (7), 855 (2006) [Semiconductors 40 (7), 834 (2006)].
3. V A. Tolmachev, T. S. Perova, E. V Astrova, B. Z. Volchek, and J. K. Vij, Phys. Status Solidi A 197 (2), 544 (2003).
4. V. A. Tolmachev, E. V. Astrova, Yu. A. Pilyugina, T. S. Perova, R. A. Moore, and J. K. Vij, Opt. Mater. (Amsterdam) 27 (5), 831 (2005).
5. D. A. Mamichev, V. Yu. Timoshenko, A. V. Zoteyev, L. A. Golovan, E. Yu. Krutkova, A. V. Laktyunkin, P. K. Kashkarov, E. V Astrova, and T. S. Perova, Phys. Status Solidi B 246 (1), 173 (2009).
6. M. Born and E. Wolf, Principles of Optics: Electromag-netic Theory of Propagation, Interference, and Diffrac-tion of Light (Pergamon, London, 1959; Nauka, Mos-cow, 1973).
7. M. Elwenspoek and H. V. Jansen, Silicon Micromachin-ing (Cambridge University Press, Cambridge, 2004).
8. Z. Yu. Gotra, Technology of Microelectronic Devices: A Handbook (Radio i Svyaz', Moscow, 1991) [in Rus-sian].
9. D. L. Kendall, Annu. Rev. Mater. Sci. 9, 373 (1979).
10. G. Barillaro, A. Nannini, and F. Pieri, J. Electrochem. Soc. 149 (3), C180 (2002).
11. E. V. Astrova and G. V. Fedulova, J. Micromech. Microeng. 19, 095009 (2009).
12. E. V. Astrova, V. A. Tolmachev, Yu. A. Zharova, et al., Solid State Phenom. 156-158, 547 (2010).
13. A. Holke and H. T. Henderson, J. Micromech. Microeng. 9 (1), 51 (1999).
14. S. G. Tikhodeev, A. L. Yablonskii, E. A. Muljarov, N. A. Gippius, and T. Ishihara, Phys. Rev. B: Condens. Matter 66, 045102 (2002).
15. D. Y K. Ko and J. C. Inkson, Phys. Rev. B: Condens. Matter 38, 9945 (1988).
16. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, The Netherlands, 1987).
17. R. M. A. Azzam and N. M. Bashara, Phys. Rev. B: Solid State 5 (12), 4721 (1973).
18. H. Benisty D. Labilloy and C. Weisbuch, Appl. Phys. Lett. 76, 532 (2000).
19. H. Benisty Ph. Lalanne, and S. Olivier, Opt. Quantum Electron. 34, 205 (2002).
20. A. A. Maradudin and D. L. Mills, Phys. Rev. B: Solid State 11, 1392 (1975).