Quality factor enhancement of lateral microresonators in liquid media by hydrophobic coating

Journal of Microelectromechanical Systems

Volumn 20, Issue 5, 2011, Pages 1068-1070

  Eroglu, Deniz ^a   Kulah, Haluk ^a  

^a MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

Author keywords

Hydrophobicity; parylene; quality factor; resonators

Indexed keywords

BIO-AGENT DETECTION; COMB DRIVE; HIGH QUALITY FACTORS; HYDROPHOBIC COATINGS; LIQUID MEDIA; MASS RESOLUTION; MICRO RESONATORS; NARROW GAP; PARYLENE COATINGS; PARYLENES; QUALITY FACTOR; QUALITY FACTORS; THIN LAYERS; VISCOUS DAMPING;

COATINGS; HYDROPHOBICITY; RESONATORS;

LIQUIDS;

EID: 80053561020     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2160936     Document Type: Article

References (13)

1. S. E. Alper and T. Akin, "A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate," J. Microelectromech. Syst., vol. 14, no. 4, pp. 707-717, Aug. 2005. (Pubitemid 41488590)
2. A. A. Seshia, M. Palaniapan, T. A. Roessig, R. T. Howe, R. W. Gooch, T. R. Schimert, and S. Montague, "A vacuum packaged surface micromachined resonant accelerometer," J. Microelectromech. Syst., vol. 11, no. 6, pp. 784-793, Dec. 2002.
3. Z. Wang and Y. Xu, "Vibration energy harvesting device based on airspaced piezoelectric cantilevers," Appl. Phys. Lett., vol. 90, no. 26, pp. 263 512-1-263 512-3, Jun. 2007.
4. S. P. Beeby, R. N. Torah, M. J. Tudor, P. Glynne-Jones, T. O'Donnell, C. R. Saha, and S. Roy, "A micro electromagnetic generator for vibration energy harvesting," J. Micromech. Microeng., vol. 17, no. 7, pp. 1257-1265, Jul. 2007. (Pubitemid 47192945)
5. B. P. Otis and J. M. Rabaey, "A 300-μW 1.9-GHz CMOS oscillator utilizing micromachined resonators," IEEE J. Solid-State Circuits, vol. 38, no. 7, pp. 1271-1274, Jul. 2003.
6. J.-F. Gong, Z. Y. Xiao, and P. C. H. Chan, "Integration of an RF MEMS resonator with a bulk CMOS process using a low-temperature and dryrelease fabrication method," J. Micromech. Microeng., vol. 17, no. 1, pp. 20-25, Jan. 2007. (Pubitemid 46476583)
7. M. Su, S. Li, and V. P. Dravid, "Microcantilever resonance-based DNA detection with nanoparticle probes," Appl. Phys. Lett., vol. 82, no. 20, pp. 3562-3564, May 2003.
8. A. Gupta, D. Akin, and R. Bashir, "Single virus particle mass detection using microresonators with nanoscale thickness," Appl. Phys. Lett., vol. 84, no. 11, pp. 1976-1978, Mar. 2004.
9. E. Bayraktar, D. Eroglu, A. T. Ciftlik, and H. Kulah, "A MEMS based gravimetric resonator for mass sensing applications," in Proc. 24th IEEE Int. Conf. Micro Electro Mech. Syst. Tech. Dig., 2011, pp. 817-820.
10. T. Scholz, J. A. Vicary, G. M. Jeppesen, A. Ulcinas, J. K. H. Hörber, and M. Antognozzi, "Processive behaviour of kinesin observed using micro-fabricated cantilevers," Nanotechnology, vol. 22, no. 9, p. 095 707, Mar. 2011.
11. J. H. Park, T. Y. Kwon, D. S. Yoon, H. Kim, and T. S. Kim, "Fabrication of microcantilever sensors actuated by piezoelectric Pb(Zr0.52Ti0.48)O3 thick films and determination of their electromechanical characteristics," Adv. Funct. Mater., vol. 15, no. 12, pp. 2021-2028, Dec. 2005. (Pubitemid 41803178)
12. O. Ducloux, J. W. Park, N. Tiercelin, P. Pernod, V. Preobrazhensky, M. Hamon, Y. Sakai, and H. Fujita, "MEMS resonators actuated by TbCo/FeCo nanostructed magnetostrictive multilayers in liquid environment," in Proc. 15th Int. Conf. Solid State Sens. Actuators Microsyst., 2009, pp. 1019-1022.
13. B. Woolford, D. Maynes, and B. W. Webb, "Liquid flow through microchannels with grooved walls under wetting and superhydrophobic conditions," Microfluid. Nanofluid., vol. 7, no. 1, pp. 121-135, Jul. 2008.