A MEMS based gravimetric resonator for MASS sensing applications

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 817-820

  Bayraktar, Ekrem ^a   Eroglu, Deniz ^a   Ciftlik, Ata Tuna ^b   Kulah, Haluk ^a  

^a MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

^b EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

GRAVIMETRIC SENSORS; HIGH RESOLUTION; LATERAL MOTION; LIQUID MEDIA; MASS SENSING; MASS SENSITIVITY; MECHANICAL STRUCTURES; POLYSTYRENE BEADS; PROOF MASS; QUALITY FACTORS; SQUEEZE-FILM DAMPING;

MECHANICAL ENGINEERING; MECHANICS; POLYSTYRENES; REACTIVE ION ETCHING; RESONATORS; SENSORS;

MEMS;

EID: 79953796964     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734550     Document Type: Conference Paper

References (5)

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