MEMS resonators actuated by TbCo/FeCo nanostructed magnetostrictive multilayers in liquid environment

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1019-1022

  Ducloux, O ^a   Park, J W ^b   Tiercelin, N ^c   Pernod, P ^c   Preobrazhensky, V ^c   Hamon, M ^a   Sakai, Y ^b   Fujita, H ^b  

^a UNIVERSITY OF TOKYO   (Japan)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^c ECOLE CENTRALE DE LILLE   (France)

Author keywords

Biosensor; Cantilever; Liquid environment; Magnetostriction; Resonator; Spin reorientation transition

Indexed keywords

CANTILEVER; CELLULAR DENSITY; LIQUID ENVIRONMENT; MAGNETOSTRICTIVE FILMS; MEMS RESONATORS; MULTI-LAYERED; NANO-STRUCTURED; QUALITY FACTORS; SPIN REORIENTATION TRANSITIONS; VISCOSITY SOLUTIONS;

ACTUATORS; ATOMIC FORCE MICROSCOPY; BIOSENSORS; LIQUIDS; MAGNETIC FIELDS; MAGNETOSTRICTION; MAGNETOSTRICTIVE DEVICES; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; NANOCANTILEVERS; PIEZOELECTRIC TRANSDUCERS; RESONATORS; SPIN DYNAMICS;

SOLID-STATE SENSORS;

EID: 71449101014     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285961     Document Type: Conference Paper

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