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Journal of Materials Chemistry

Volumn 21, Issue 40, 2011, Pages 15962-15968

Scanning electrochemical microscopy as an etching tool for ITO patterning

(6) Grisotto, Federico a Métayé, Roamin a Jousselme, Bruno a Geffroy, Bernard a,b Palacin, Serge a Charlier, Julienne a

a DIF (France)

b LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES (France)

Author keywords

[No Author keywords available]

Indexed keywords

AQUEOUS ACIDS; CONDUCTIVE ELECTRODES; DISPLAY TECHNOLOGIES; ELECTROLYTIC SOLUTION; ETCHING TOOLS; GROWTH POTENTIAL; INDIUM TIN OXIDE FILMS; INDIUM TIN OXIDE THIN FILMS; ITO FILMS; LOW-COST PATTERNING; MASK LESS; PATTERNING TECHNIQUES; REDEPOSITION; SCANNING ELECTROCHEMICAL MICROSCOPES; SCANNING ELECTROCHEMICAL MICROSCOPY; SOFT ETCHING;

CONDUCTIVE FILMS; DISPLAY DEVICES; ELECTRIC PROPERTIES; ELECTROCHEMICAL ETCHING; INDIUM; INDIUM COMPOUNDS; ITO GLASS; MICROELECTRODES; OPTICAL PROPERTIES; OXIDE FILMS; SCANNING; SCANNING ELECTRON MICROSCOPY; SCANNING PROBE MICROSCOPY; SURFACE CHEMISTRY; TIN; TIN OXIDES;

ANALYTIC EQUIPMENT;

EID: 80053502701 PISSN: 09599428 EISSN: 13645501 Source Type: Journal
DOI: 10.1039/c1jm12858b Document Type: Article

Times cited : (10)

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