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Volumn 509, Issue 42, 2011, Pages 10190-10194

Transparent conducting oxide films of heavily Nb-doped titania by reactive co-sputtering

Author keywords

Anatase; Nb doped TiO2; Rutile; Titania; Transparent conducting oxide

Indexed keywords

ANATASE PHASE; ANNEALED FILMS; ATOMIC PERCENT; HIGH CONDUCTIVITY; METAL TARGET; REACTIVE CO-SPUTTERING; REDUCED RESISTIVITY; RUTILE; RUTILE STRUCTURE; SILICON SUBSTRATES; SUBSTRATE BIAS; TARGET POWER; TITANIA; TRANSPARENT CONDUCTING OXIDE; TRANSPARENT CONDUCTING OXIDE FILMS;

EID: 80053357717     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2011.08.020     Document Type: Article
Times cited : (30)

References (29)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.