Sputtered Nb- and Ta-doped TiO2 transparent conducting oxide films on glass

Journal of Materials Research

Volumn 22, Issue 10, 2007, Pages 2832-2837

  Gillispie, Meagen A ^a,b   van Hest, Maikel F A M ^a   Dabney, Matthew S ^a   Perkins, John D ^a   Ginley, David S ^a  

^a NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

^b IOWA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CRYSTAL STRUCTURE; GLASS; MAGNETRON SPUTTERING; NIOBIUM; OXIDE FILMS; SUBSTRATES; TANTALUM;

CONDUCTING OXIDE FILMS; GLASS SUBSTRATES; RADIO FREQUENCY (RF) MAGNETRON SPUTTERING;

TITANIUM DIOXIDE;

EID: 35448943565     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2007.0353     Document Type: Article

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