ZnO based film bulk acoustic resonator for environment monitoring

Micro and Nanosystems

Volumn 3, Issue 2, 2011, Pages 104-110

  Qiu, Xiaotun ^a   Yu, Hongyu ^a,b  

^a Arizona State University   (United States)

^b ARIZONA STATE UNIVERSITY   (United States)

Author keywords

Acetone; Film bulk acoustic resonator; Ozone; Relative humidity; Ultraviolet; Zinc oxide

Indexed keywords

ACETONE; ACOUSTIC EQUIPMENT; ACOUSTIC RESONATORS; ATMOSPHERIC HUMIDITY; CHEMICAL SENSORS; FREQUENCY DOMAIN ANALYSIS; METALS; OZONE; REMOTE SENSING; THIN FILMS; WIRELESS SENSOR NETWORKS; ZINC; ZINC OXIDE;

ENVIRONMENT MONITORING; ENVIRONMENTAL FACTORS; FEASIBLE DIRECTIONS; FILM BULK ACOUSTIC RESONATORS; FREQUENCY DOMAINS; PIEZOELECTRIC THIN FILMS; SEMICONDUCTOR METAL OXIDES; ULTRAVIOLET;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 80052958452     PISSN: 18764029     EISSN: 18764037     Source Type: Journal    
DOI: 10.2174/1876402911103020104     Document Type: Article

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