Epitaxial growth and electrical-transport properties of Ti 7Si2C5 thin films synthesized by reactive sputter-deposition

Scripta Materialia

Volumn 65, Issue 9, 2011, Pages 811-814

  Scabarozi, T H ^a,b   Hettinger, J D ^a   Lofland, S E ^a   Lu, J ^b   Hultman, L ^b   Jensen, J ^b   Eklund, P ^b  

^a ROWAN UNIVERSITY   (United States)

^b LINKÖPING UNIVERSITY   (Sweden)

Author keywords

Electrical resistivity conductivity; Sputtering; Ti3SiC2; Transmission electron microscopy (TEM); X ray diffraction (XRD)

Indexed keywords

ACETYLENE GAS; ELASTIC RECOIL DETECTION ANALYSIS; ELECTRICAL RESISTIVITY; METALLIC TEMPERATURE DEPENDENCE; REACTIVE MAGNETRON SPUTTERING; REACTIVE SPUTTER-DEPOSITION; ROOM-TEMPERATURE RESISTIVITY; STABILIZATION MECHANISMS; UNIT CELLS; X-RAY DIFFRACTION (XRD);

ACETYLENE; DEPOSITION; EPITAXIAL GROWTH; NITROGEN; SILICON; SILICON CARBIDE; SPUTTERING; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; TRANSPORT PROPERTIES; VAPOR DEPOSITION; X RAY DIFFRACTION;

ELECTRIC PROPERTIES;

EID: 80052813030     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2011.07.038     Document Type: Article

References (23)

1. M.W. Barsoum Prog. Solid State Chem. 28 2000 201
2. P. Eklund, M. Beckers, U. Jansson, H. Högberg, and L. Hultman Thin Solid Films 518 2010 1851
3. J.Y. Wang, and Y.C. Zhou Annu. Rev. Mater. Res. 39 2009 415
4. Z.C. Wang, M. Saito, S. Tsukimoto, and Y. Ikuhara Adv. Mater. 21 2009 4966
5. Z.C. Wang, S. Tsukimoto, R. Sun, M. Saito, and Y. Ikuhara Appl. Phys. Lett. 98 2011 104101
6. K. Buchholt, R. Ghandi, M. Domeij, C.-M. Zetterling, J. Lu, P. Eklund, L. Hultman, and A. Lloyd Spetz Appl. Phys. Lett. 98 2011 042108
7. K. Buchholt, P. Eklund, J. Jensen, J. Lu, A. Lloyd Spetz, and L. Hultman Scripta Mater. 12 2011 1141
8. F. Mercier, O. Chaix-Pluchery, T. Ouisse, and D. Chaussende Appl. Phys. Lett. 98 2011 081912
9. F. Mercier, T. Ouisse, and D. Chaussende Phys. Rev. B 83 2011 075411
10. J.-P. Palmquist, S. Li, P.O.. Persson, J. Emmerlich, O. Wilhelmsson, H. Högberg, M.I. Katsnelson, B. Johansson, R. Ahuja, O. Eriksson, L. Hultman, and U. Jansson Phys. Rev. B 70 2004 165401
11. H. Högberg, P. Eklund, J. Emmerlich, J. Birch, and L. Hultman J. Mater. Res. 20 2005 779
12. Y.C. Zhou, F. Meng, and J. Zhang J. Am. Ceram. Soc. 91 2008 1357
13. T.H. Scabarozi, C. Gennaoui, J. Roche, T. Flemming, K. Wittenberger, P. Hann, B. Adamson, A. Rosenfeld, M.W. Barsoum, J.D. Hettinger, and S.E. Lofland Appl. Phys. Lett. 95 2009 101907
14. H.J. Whitlow, G. Possnert, and C.S. Petersson Nucl. Instr. and Meth. B 27 1987 448
15. M.S. Janson CONTES, Conversion of Time-Energy Spectra, a Program for ERDA Data Analysis 2004 Uppsala University
16. S.E. Lofland, J.D. Hettinger, T. Meehan, A. Bryan, P. Finkel, S. Gupta, M.W. Barsoum, and G. Hug Phys. Rev. B 74 2006 174501
17. J. Rosén, P.O.. Persson, M. Ionescu, A. Kondyurin, D.R. McKenzie, and M.M.M. Bilek Appl. Phys. Lett. 92 2008 064102
18. J. Rosén, M. Dahlqvist, S.I. Simak, D.R. McKenzie, and M.M.M. Bilek Appl. Phys. Lett. 97 2010 073103
19. J. Emmerlich, P. Eklund, D. Rittrich, H. Högberg, and L. Hultman J. Mater. Res. 22 2007 2279
20. M.W. Barsoum, H.-I. Yoo, I.K. Polushina, V.Y. Rud', Y.V. Rud', and T. El-Raghy Phys. Rev. B 62 2000 10194
21. P. Finkel, J.D. Hettinger, S.E. Lofland, M.W. Barsoum, and T. El-Raghy Phys. Rev. B 65 2001 035113
22. P. Eklund, M. Bugnet, V. Mauchamp, S. Dubois, C. Tromas, J. Jensen, L. Piraux, L. Gence, M. Jaouen, and T. Cabioc'h Phys. Rev. B 84 2011 075424
23. T.H. Scabarozi, P. Eklund, J. Emmerlich, H. Hogberg, T. Meehan, P. Finkel, M.W. Barsoum, J.D. Hettinger, L. Hultman, and S.E. Lofland Solid State Commun. 146 2008 498