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Volumn 56, Issue 24, 2011, Pages 8260-8271

Numerical analysis of electrodeposition in microcavities

Author keywords

Electrodeposition; LIGA; Micromanufacturing; Micromolding; Overplating

Indexed keywords

APPLIED VOLTAGES; COMPUTATIONAL MODEL; CURRENT DENSITY PROFILES; ELECTROCHEMICAL PHENOMENA; IN-PROCESS; LIGA; METALLIC MICROSTRUCTURES; MICRO PART; MICRO-MOLDS; MICROMANUFACTURING; MICROMOLDING; OVERPLATING; PART QUALITY;

EID: 80052807134     PISSN: 00134686     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.electacta.2011.06.084     Document Type: Article
Times cited : (17)

References (19)
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    • G. Ding, Y. Zhang, J. Liu, X. Zhao, B. Cai, and T. Shen Micromachining and Microfabrication Process Technology and Devices N.C. Tien, Q.-A. Huang, Proceedings of the SPIE, Vol. 4601 Nanjing, China, 7-9 November, SPIE, Bellingham WA 2001 9780819443403
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    • Ding, G.1    Zhang, Y.2    Liu, J.3    Zhao, X.4    Cai, B.5    Shen, T.6
  • 12
    • 57649222471 scopus 로고    scopus 로고
    • Micromachining and Microfabrication Process Technology III
    • S.-C. Chang, S.W. Pang, Austin, TX, USA, SPIE, Bellingham WA 9780819426550
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    • (1997) Proceedings of the SPIE, Vol. 3223 , pp. 100-109
    • Chang, S.-C.1    Edens, J.2
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    • 80052789251 scopus 로고    scopus 로고
    • Micromachining and Microfabrication Process Technology XI
    • M.-A. Maher, H.D. Stewart, J.-C. Chiao, 61090M, San Jose, CA, USA, SPIE, Bellingham WA 9780819461513
    • Y. Guo, G. Liu, and Y. Tian Micromachining and Microfabrication Process Technology XI M.-A. Maher, H.D. Stewart, J.-C. Chiao, Proceedings of the SPIE, Vol. 6109 61090M, San Jose, CA, USA, SPIE, Bellingham WA 2006 9780819461513
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.