|
Volumn 56, Issue 24, 2011, Pages 8260-8271
|
Numerical analysis of electrodeposition in microcavities
|
Author keywords
Electrodeposition; LIGA; Micromanufacturing; Micromolding; Overplating
|
Indexed keywords
APPLIED VOLTAGES;
COMPUTATIONAL MODEL;
CURRENT DENSITY PROFILES;
ELECTROCHEMICAL PHENOMENA;
IN-PROCESS;
LIGA;
METALLIC MICROSTRUCTURES;
MICRO PART;
MICRO-MOLDS;
MICROMANUFACTURING;
MICROMOLDING;
OVERPLATING;
PART QUALITY;
ELECTROFORMING;
LITHOGRAPHY;
MICROCAVITIES;
MOLDING;
NUMERICAL ANALYSIS;
ELECTRODEPOSITION;
|
EID: 80052807134
PISSN: 00134686
EISSN: None
Source Type: Journal
DOI: 10.1016/j.electacta.2011.06.084 Document Type: Article |
Times cited : (17)
|
References (19)
|