Electrochemical studies of electrodeposition of nickel for LIGA microstructures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4601, Issue , 2001, Pages 306-311

  Ding, Guifu ^a   Zhang, Yi ^a   Liu, Jingquan ^a   Zhao, Xioalin ^a   Cai, Binchu ^a   Shen, Tianhui ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Deep holes; Electrochemical measurements; LIGA process; Micro gears box; Microelectroforming

Indexed keywords

ELECTRIC IMPEDANCE; ELECTROCHEMISTRY; ELECTRODES; ELECTROFORMING; ELECTROPLATING; FABRICATION; GEARS; MICROSTRUCTURE;

LINEAR POTENTIAL SWEEP TECHNIQUES; MICROELECTROFORMING;

NICKEL PLATING;

EID: 0035770871     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.444706     Document Type: Conference Paper

References (10)

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