Young's modulus and coefficient of linear thermal expansion of ZnO conductive and transparent ultra-thin films

Advances in Materials Science and Engineering

Volumn 2011, Issue , 2011, Pages

  Yamamoto, Naoki ^a   Makino, Hisao ^a   Yamamoto, Tetsuya ^a  

^a KOCHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 80052647095     PISSN: 16878434     EISSN: 16878442     Source Type: Journal    
DOI: 10.1155/2011/136127     Document Type: Article

References (24)

1. Kempthorne D., Myers M. D., Mineral Commodity Summaries 2007 2007 Washington, DC, USA United States Government Printing Office
2. Homma S., Miyamoto A., Sakamoto S., Kishi K., Motoi N., Yoshimura K., Pulmonary fibrosis in an individual occupationally exposed to inhaled indium-tin oxide The European Respiratory Journal 2005 25 1 200 204 (Pubitemid 40207750)
3. Yamamoto T., Yamada T., Miyake A., Makino H., Yamamoto N., Ga-doped zinc oxide: an attractive potential substitute for ITO, large-area coating, and control of electrical and optical properties on glass and polymer substrates Journal of the Society for Information Display 2008 16 7 713 719
4. Wagner R. S., Sinha A. K., Sheng T. T., Levinstein H. J., Alexander F. B., Tungsten metallization for LSI applications Journal of Vacuum Science and Technology 1974 11 582 590
5. Thornton J. A., Hoffman D. W., Internal stresses in titanium, nickel, molybdenum, and tantalum films deposited by cylindrical magnetron sputtering Journal of Vacuum Science and Technology 1977 14 164 168
6. Hoffman D. W., Thornton J. A., The compressive stress transition in Al, V, Zr, Nb and W metal films sputtered at low working pressures Thin Solid Films 1977 45 2 387 396 (Pubitemid 8624690)
7. Windischmann H., Intrinsic stress in sputter-deposited thin films Critical Reviews in Solid State and Materials Sciences 1992 17 6 547 596 (Pubitemid 23631062)
8. Yamamoto N., Kume H., Iwata S., Yagi K., Kobayashi N., Mori N., Miyazaki H., Fabrication of highly reliable tungsten gate MOS VLSI's Journal of the Electrochemical Society 1986 133 2 401 407 (Pubitemid 16488275)
9. Cuthrell R. E., Mattox D. M., Peeples C. R., Dreike P. L., Lamppa K. P., Residual stress anisotropy, stress control, and resistivity in post cathode magnetron sputter deposited molybdenum films Journal of Vacuum Science and Technology A 1988 6 5 2914 2920
10. Yamamoto N., Yamada T., Miyake A., Makino H., Kishimoto S., Yamamoto T., Relationship between residual stress and crystallographic structure in Ga-doped ZnO film Journal of the Electrochemical Society 2008 155 9 J221 J225
11. Yamamoto N., Makino H., Yamada T., Heat resistance of Ga-doped ZnO thin films for application as transparent electrodes in liquid crystal displays Journal of the Electrochemical Society 2010 157 2 J13 J20
12. Tadmor E. B., Miller R., Phillips R., Nanoindentation and incipient plasticity Journal of Materials Research 1999 14 6 2233 2250
13. Prevey P. S., X-ray diffraction residual stress techniques Metals Handbook 1986 10 Metals Park, Ohio, USA American Society for Metals 380 392
14. Tanner B. K., Hase T. P. A., Lafford T. A., Goorsky M. S., Grazing incidence in-plane X-ray diffraction, international centre for diffraction data Advances in X-Ray Analysis 2004 47 309 314
15. Williamson G. K., Hall W. H., X-ray line broadening from filed aluminium and wolfram Acta Metallurgica 1953 1 1 23 31
16. Okada Y., Tokumura Y., Precise determination of lattice parameter and thermal expansion coefficient of silicon 300K1500K Journal of Applied Physics 1984 56 2 314 320 (Pubitemid 14626802)
17. Imai S., Tokuyama M., Hirose S., Burger G. J., Lammerink T. S. J., Fluitman J. H. J., A thin-film piezoelectric impact sensor array fabricated on a Si slider for measuring head-disk interaction IEEE Transactions on Magnetics 1995 31 6 3009 3011
18. Yoon H. K., Yu Y. S., Hardness and elastic modulus of ZnO thin films fabricated by PLD method Key Engineering Materials 2007 353358 4 2966 2969
19. zen I., Glgn M. A., zcan M., Self-induced crystallinity in RF magnetron sputtered ZnO thin films Key Engineering Materials 2004 264268 1225 1228
20. Jung H. C., Yoon H. K., Yu Y. S., Mechanical properties and process of ZnO deposited various substrates Key Engineering Materials 2005 297300 533 538 (Pubitemid 46832742)
21. Cao G., Chen X., Size dependence and orientation dependence of elastic properties of ZnO nanofilms International Journal of Solids and Structures 2008 45 6 1730 1753 (Pubitemid 351172253)
22. Stan G., Ciobanu C. V., Parthangal P. M., Cook R. F., Diameter-dependent radial and tangential elastic moduli of ZnO nanowires Nano Letters 2007 7 12 3691 3697
23. Kappertz O., Drese R., Wuttig M., Correlation between structure, stress and deposition parameters in direct current sputtered zinc oxide films Journal of Vacuum Science and Technology A 2002 20 6 2084 2095
24. Fang T.-H., Chang W.-J., Lin C.-M., Nanoindentation characterization of ZnO thin films Materials Science and Engineering A 2007 452-453 715 720