Self-induced crystallinity in RF magnetron sputtered ZnO thin films

Key Engineering Materials

Volumn 264-268, Issue II, 2004, Pages 1225-1228

  Ozen I ^a   Gulgun M A ^a   Özcan, Meriç ^a  

^a SABANCI UNIVERSITY   (Turkey)

Author keywords

Crystallinity; Epitaxy; RF magnetron sputtering; Thin films; ZnO

Indexed keywords

AMORPHOUS MATERIALS; CERAMIC MATERIALS; CRYSTALLIZATION; FILM GROWTH; GLASS; MAGNETRON SPUTTERING; MICA; MICROMETERS; RESIDUAL STRESSES; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

CRYSTALLINE SUBSTRATES; SELF-INDUCED CRYSTALLINITY;

THIN FILMS;

EID: 8644277299     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/kem.264-268.1225     Document Type: Conference Paper

References (9)

1. E. Dumont, B. Dugnoille and S. Bienfait: Thin Solid Films Vol. 353 (1999), p. 93.
2. E.M. Bachari, G. Baud, S. Ben Amor and M. Jacquet: Thin Solid Films Vol. 348 (1999), p. 165.
3. B.M. Ataev, I.K. Kamilov, A.M. Bagamadova, V.V. Mamedov, A.K. Omaev and M.Kh. Rabadanov: Mater. Sci. and Eng. B Vol. 68 (1999), p. 56.
4. L.-J. Meng and M. P. dos Santos: Thin Solid Films Vol. 250 (1994), p. 26.
5. Z.G. Liu, W.S. Hu, X.L. Guo, S.N. Zhu, D. Feng and C. Lin: Mater. Lett. Vol. 25 (1995), p. 5.
6. M. Akiyama, H.R. Kokabi, K. Nonaka, K. Shobu and T. Watanabe: J. Am. Ceram. Soc. Vol. 78 (1995), p. 3004.
7. W. Water and S.-Y. Chu: Mater. Lett. Vol. 55 (2002), p. 67.
8. P. Chindaudom and K. Vedam: Characterization of Inhomogeneous Transparent Films, Physics of Thin Films Vol. 19 (Academic Press, New York, 1994).
9. M.-Y. Han and J.-H. Jou: Thin Solid Films, Vol. 260 (1995), p. 58.