A photo-stimulated spectroscopic method for spatially resolved stress analysis in hetero-epitaxial films

Journal of Physics D: Applied Physics

Volumn 42, Issue 1, 2009, Pages

  Zhu, W L ^a   Zhu, J L ^b   Ge, W Y ^a   Pezzotti, G ^a  

^a KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

^b SICHUAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AVERAGING EFFECT; CERAMIC THIN FILMS; DATA RESTORATION; DEFOCUSING; FINITE SIZE; FLUORESCENCE EMISSION; HIGH RESOLUTION; LASER PROBES; PIEZO-SPECTROSCOPIC METHODS; PROBE RESPONSE FUNCTIONS; QUANTITATIVE MEASUREMENT; RESIDUAL STRESS DISTRIBUTIONS; SPATIALLY RESOLVED; SPECTRAL BAND; SPECTROSCOPIC METHOD; STRESS SENSOR; SUBSTRATE ORIENTATION;

EPITAXIAL FILMS; PROBES; SENSORS; STRESS ANALYSIS; STRESS CONCENTRATION;

SPECTROSCOPIC ANALYSIS;

EID: 80052339824     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/1/015505     Document Type: Article

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