-
3
-
-
33645787845
-
-
10.1109/JMEMS.2006.872229 1:CAS:528:DC%2BD28XkslSqurc%3D
-
Y. Hishinuma E.H. Yang 2006 J. Microelectromech. Syst. 15 370 10.1109/JMEMS.2006.872229 1:CAS:528:DC%2BD28XkslSqurc%3D
-
(2006)
J. Microelectromech. Syst.
, vol.15
, pp. 370
-
-
Hishinuma, Y.1
Yang, E.H.2
-
4
-
-
0036544041
-
PZT thin films for piezoelectric microactuator applications
-
DOI 10.1016/S0924-4247(01)00850-0, PII S0924424701008500
-
H. Kueppers T. Leuerer U. Schnakenberg W. Mokwa M. Hoffmann T. Schneller U. Boettger R. Waser 2002 Sens. Actuator A-Phys. 97-98 680 10.1016/S0924- 4247(01)00850-0 (Pubitemid 34758782)
-
(2002)
Sensors and Actuators, A: Physical
, vol.97-98
, pp. 680-684
-
-
Kueppers, H.1
Leuerer, T.2
Schnakenberg, U.3
Mokwa, W.4
Hoffmann, M.5
Schneller, T.6
Boettger, U.7
Waser, R.8
-
5
-
-
33845703140
-
Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor
-
DOI 10.1016/j.sna.2006.03.035, PII S0924424706002792
-
F.F.C. Duval S.A. Wilson G. Ensell N.M.P. Evanno M.G. Cain R.W. Whatmore 2007 Sens. Actuator A-Phys. 133 35 10.1016/j.sna.2006.03.035 (Pubitemid 44963518)
-
(2007)
Sensors and Actuators, A: Physical
, vol.133
, Issue.1
, pp. 35-44
-
-
Duval, F.F.C.1
Wilson, S.A.2
Ensell, G.3
Evanno, N.M.P.4
Cain, M.G.5
Whatmore, R.W.6
-
7
-
-
0033903421
-
Fabrication of PZT thick films on silicon substrates for piezoelectric actuator
-
DOI 10.1023/A:1009924113335
-
Y. Jeon J.S. Chung K. No 2000 J. Electroceram. 4 195 10.1023/A: 1009924113335 1:CAS:528:DC%2BD3cXis1elsb4%3D (Pubitemid 30565623)
-
(2000)
Journal of Electroceramics
, vol.4
, Issue.1
, pp. 195-199
-
-
Jeon, Y.1
Chung, J.2
No, K.3
-
8
-
-
0036647118
-
-
10.1111/j.1151-2916.2002.tb00344.x 1:CAS:528:DC%2BD38XlsV2it70%3D
-
J. Ma W. Cheng 2002 J. Am. Ceram. Soc. 85 1735 10.1111/j.1151-2916.2002. tb00344.x 1:CAS:528:DC%2BD38XlsV2it70%3D
-
(2002)
J. Am. Ceram. Soc.
, vol.85
, pp. 1735
-
-
Ma, J.1
Cheng, W.2
-
9
-
-
3142740207
-
-
10.1023/B:JECR.0000033999.74149.a3 1:CAS:528:DC%2BD2cXlsVWnsrc%3D
-
R.A. Dorey R.W. Whatmore 2004 J. Electroceram. 12 19 10.1023/B:JECR. 0000033999.74149.a3 1:CAS:528:DC%2BD2cXlsVWnsrc%3D
-
(2004)
J. Electroceram.
, vol.12
, pp. 19
-
-
Dorey, R.A.1
Whatmore, R.W.2
-
11
-
-
0034887667
-
Routes to net shape electroceramic devices and thick films
-
DOI 10.1016/S0955-2219(01)00161-3, PII S0955221901001613
-
B. Su D.H. Pearce T.W. Button 2001 J. Eur. Ceram. Soc. 21 2005 10.1016/S0955-2219(01)00161-3 1:CAS:528:DC%2BD3MXms12is7c%3D (Pubitemid 32763982)
-
(2001)
Journal of the European Ceramic Society
, vol.21
, Issue.10-11
, pp. 2005-2009
-
-
Su, B.1
Pearce, D.H.2
Button, T.W.3
-
13
-
-
42149083464
-
Active micro-structured arrays for X-ray optics
-
DOI 10.1117/12.735500, Advances in X-Ray/EUV Optics and Components II
-
A. Michette T. Button C. Dunare C. Feldman M. Folkard D. Hart C. McFaul G.R. Morrison W. Parkes S. Pfauntsch A.K. Powell D. Rodriguez-Sanmartin S. Sahraei T. Stevenson B. Vojnovic R. Willingaled D. Zhang 2007 Proc. SPIE 6705 670502 10.1117/12.735500 (Pubitemid 351529407)
-
(2007)
Proceedings of SPIE - The International Society for Optical Engineering
, vol.6705
, pp. 670502
-
-
Michette, A.1
Button, T.2
Dunare, C.3
Feldman, C.4
Folkard, M.5
Hart, D.6
McFaul, C.7
Morrison, G.R.8
Parkes, W.9
Pfauntsch, S.10
Powell, A.K.11
Rodriguez-Sanmartin, D.12
Sahraei, S.13
Stevenson, T.14
Vojnovic, B.15
Willingale, R.16
Zhang, D.17
-
14
-
-
42149182576
-
Large thin adaptive X-ray mirrors
-
DOI 10.1117/12.734608, Advances in X-Ray/EUV Optics and Components II
-
P. Doel C. Atkins S. Thompson D. Brooks J. Yao C. Feldman R. Willingale T. Button D. Zhang A. James 2007 Proc. SPIE 6705 67050M 10.1117/12.734608 (Pubitemid 351529425)
-
(2007)
Proceedings of SPIE - The International Society for Optical Engineering
, vol.6705
-
-
Doel, P.1
Atkins, C.2
Thompson, S.3
Brooks, D.4
Yao, J.5
Feldman, C.6
Willingale, R.7
Button, T.8
Zhang, D.9
James, A.10
-
15
-
-
42149190056
-
Active X-ray mirror development at UCL: Preliminary results
-
DOI 10.1117/12.782955, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes
-
C. Atkins P. Doel J. Yao D. Brooks S. Thompson R. Willingale C. Feldman T. Button D. Zhang A. James 2007 Proc. SPIE 6721 67210T 10.1117/12.782955 (Pubitemid 351536784)
-
(2007)
Proceedings of SPIE - The International Society for Optical Engineering
, vol.6721
-
-
Atkins, C.1
Doel, P.2
Jun, Y.3
Brooks, D.4
Thompson, S.5
Willingale, R.6
Feldman, C.7
Button, T.8
Dou, Z.9
James, A.10
-
16
-
-
53949112012
-
-
10.1016/j.jmatprotec.2008.01.046 1:CAS:528:DC%2BD1cXhtlWhs7bL
-
B. Su T.W. Button 2009 J. Mater. Process. Technol. 209 153 10.1016/j.jmatprotec.2008.01.046 1:CAS:528:DC%2BD1cXhtlWhs7bL
-
(2009)
J. Mater. Process. Technol.
, vol.209
, pp. 153
-
-
Su, B.1
Button, T.W.2
|