High-Response X-Y Stage System Driven by In-Parallel Linear Motors

CIRP Annals - Manufacturing Technology

Volumn 45, Issue 1, 1996, Pages 359-362

  Tomita, Yoshiyuki ^a   Makino, Kenichi ^a   Sugimine, Masanobu ^a   Taniguchi, N ^a  

^a SUMITOMO HEAVY INDUSTRIES LTD   (Japan)

Author keywords

Electrical actuator; Position control; Servomechanism

Indexed keywords

ACCELERATION CONTROL; ACTUATORS; CONTROL SYSTEM ANALYSIS; ELECTRIC CONTROL EQUIPMENT; FORCE CONTROL; LINEAR MOTORS; OBSERVABILITY; POSITION CONTROL; THREE TERM CONTROL SYSTEMS;

HIGH RESPONSE XY STAGE SYSTEM; IN PARALLEL LINEAR MOTORS;

SERVOMECHANISMS;

EID: 0029696083     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)63080-7     Document Type: Article

References (9)

1. Accurate Motion Controller Design Based on an Extended Pole Placement Method and a Disturbance Observer
2. Step-and-Scan Lithography using Reduction Optics
3. Basic Structure of Four-Phase PM-type Stepping Surface Motor and the Driving Method
4. Nanometer positioning and its micro-dynamics
5. A Servo-Guided X-Y-Theta Stage for Electron Beam Lithography
6. Micro-Processor-Controlled DC Motor for Load-Insensitive Position Servo System
7. Positioning Table with High Accuracy and High Speed