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Volumn 4, Issue 8, 2011, Pages

High fatigue endurance and large remanent polarization in Pt/SrRuO 3/BiFe0.Mn0.05O3/ SrRuO 3/Pt ferroelectric capacitors formed on SiO2-coated Si substrates

(3) Kim, Jeong Hwan a Funakubo, Hiroshi a Ishiwara, Hiroshi a,b

a TOKYO INSTITUTE OF TECHNOLOGY (Japan)

b Konkuk University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BOTTOM ELECTRODES; COERCIVE VOLTAGES; FATIGUE ENDURANCES; FERROELECTRIC CAPACITORS; FERROELECTRIC PROPERTY; LIFT-OFF METHODS; PATTERNED PHOTORESISTS; PT FILMS; RADIO FREQUENCY SPUTTERING; RF-SPUTTERING; ROOM TEMPERATURE; SI SUBSTRATES;

CAPACITORS; DURABILITY; ELECTRODES; FERROELECTRIC DEVICES; MANGANESE; PHOTORESISTS; PLATINUM; POLARIZATION; SILICON COMPOUNDS; VACUUM EVAPORATION;

FERROELECTRICITY;

EID: 80051585988 PISSN: 18820778 EISSN: 18820786 Source Type: Journal
DOI: 10.1143/APEX.4.081501 Document Type: Article

Times cited : (4)

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