Discharge characteristics of a radio-frequency capacitively coupled Ar/O2 glow discharge at atmospheric pressure

Thin Solid Films

Volumn 519, Issue 20, 2011, Pages 6990-6993

  Li, Shou Zhe ^a,b   Wu, Qi ^a,b   Zhang, Jialiang ^a,b   Wang, Dezhen ^a,b   Uhm, Han S ^c  

^a BEIJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS   (China)

^b DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^c Kwangwoon University   (South Korea)

Author keywords

Atmospheric pressure; Glow discharge; Radio frequency

Indexed keywords

ARGON PLASMAS; CAPACITIVELY COUPLED; DISCHARGE CHARACTERISTICS; DISCHARGE REGIMES; INPUT POWER; RADIO FREQUENCIES; RADIO-FREQUENCY;

ATMOSPHERIC PRESSURE; ATMOSPHERICS; GLOW DISCHARGES; OXYGEN;

ELECTRON TEMPERATURE;

EID: 80051552193     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.01.222     Document Type: Conference Paper

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