Micropatterning and transferring of polymeric semiconductor thin films by hot lift-off and polymer bonding lithography in fabrication of organic field effect transistors (OFETs) on flexible substrate

Applied Surface Science

Volumn 257, Issue 22, 2011, Pages 9264-9268

  Yu, Xinhong ^a   Wang, Zhe ^a   Yu, Sunyang ^a   Ma, Dongge ^a   Han, Yanchun ^a  

^a CHANGCHUN INSTITUTE OF APPLIED CHEMISTRY   (China)

Author keywords

Hot lift off; Polymer bonding lithography

Indexed keywords

FABRICATION; LITHOGRAPHY; MICROCHANNELS; ORGANIC FIELD EFFECT TRANSISTORS; POLYDIMETHYLSILOXANE; POLYMER FILMS; SILICONES; THIN FILM CIRCUITS; THIN FILMS; TRANSISTORS;

FIELD-EFFECT MOBILITIES; FLEXIBLE SUBSTRATE; LIFT OFFS; POLYDIMETHYLSILOXANE PDMS; POLYMER-BONDING LITHOGRAPHY; POLYMERIC DIELECTRICS; POLYMERIC SEMICONDUCTORS; SEMICONDUCTOR LAYERS;

SUBSTRATES;

EID: 80051548295     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.05.006     Document Type: Article

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