Development and testing of a MEMS piezoelectric energy harvester

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7288, Issue , 2009, Pages

  Knight, Ryan R ^a   Mo, Changki ^a   Clark, William W ^a  

^a University of Pittsburgh   (United States)

Author keywords

Electrode; Energy harvesting; Finite element analysis; Interdigitated; MEMS; Piezoelectric

Indexed keywords

ELECTRODE DIMENSIONS; ELECTRODE PATTERN; ENERGY HARVESTING; FINITE ELEMENT ANALYSIS; FINITE ELEMENT MODELING; INTERDIGITATED; KEY FEATURE; MICRO-SCALES; NONUNIFORM; PARAMETRIC STUDY; PIEZOELECTRIC; PIEZOELECTRIC ENERGY; PIEZOELECTRIC LAYERS; PIEZOELECTRIC UNIMORPH; SIMPLIFIED MODELS; VIBRATION ENERGIES;

CONCRETE BRIDGES; HARVESTING; INTEGRATED CONTROL; MEMS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY;

FINITE ELEMENT METHOD;

EID: 69549128388     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.815533     Document Type: Conference Paper

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