In situ fabrication and actuation of polymer magnetic microstructures

Journal of Microelectromechanical Systems

Volumn 20, Issue 4, 2011, Pages 785-787

  Chung, Su Eun ^a   Kim, Jiyun ^a   Choi, Sung Eun ^a   Kim, Lily Nari ^a   Kwon, Sunghoon ^a  

^a Seoul National University   (South Korea)

Author keywords

Fabrication; magnetic materials; microactuators; microassembly; photolithography

Indexed keywords

FABRICATION TECHNIQUE; HETEROGENEOUS STRUCTURES; IN-SITU; IN-SITU FABRICATION; MAGNETIC ACTUATION; MAGNETIC ACTUATORS; MAGNETIC MICRO ACTUATORS; MAGNETIC MICROSTRUCTURES; MAGNETIC NANOPARTICLES; MAGNETIC-FIELD INTENSITY; MICRO ASSEMBLY; MICROFLUIDIC CHANNEL; MN CONCENTRATIONS; NONMAGNETICS; OXYGEN CONCENTRATIONS; PDMS SUBSTRATE; PHOTOPATTERNED; PHOTOPOLYMER RESINS; POLYDIMETHYLSILOXANE PDMS; POLYETHYLENE GLYCOL DIACRYLATE; POLYMER MAGNETIC; SACRIFICIAL LAYER; SELF-ASSEMBLED; SINGLE SITES; SINGLE-STEP; TRANSLATIONAL VELOCITY; UV CURABLE POLYMER;

ETHYLENE; FABRICATION; GLYCOLS; MAGNETIC FIELDS; MAGNETIC MATERIALS; MICROACTUATORS; MICROCHANNELS; MICROSTRUCTURE; NANOCANTILEVERS; NANOPARTICLES; PHOTOLITHOGRAPHY; POLYETHYLENE GLYCOLS; RESINS; SILICONES; THREE DIMENSIONAL;

NANOMAGNETICS;

EID: 79961208949     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2159093     Document Type: Article

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