Integrated mechano-optical hydrogen gas sensor using cantilever bending readout with a Si3N4 grated waveguide

Optics Letters

Volumn 36, Issue 15, 2011, Pages 3003-3005

  Pham, So V ^a   Dijkstra, Meindert ^a   Van Wolferen, Henk A G M ^b   Pollnau, M Markus ^a   Krijnen, Gijs J M ^b   Hoekstra, Hugo J W M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; NANOCANTILEVERS; WAVEGUIDES;

CANTILEVER BENDING; FABRICATED DEVICE; HYDROGEN GAS SENSORS; INITIAL BENDING; MICRO-CANTILEVERS; PROOF OF CONCEPT;

CHEMICAL SENSORS;

EID: 79961135935     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.36.003003     Document Type: Article

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