Read-out of cantilever bending with a grated waveguide optical cavity

IEEE Photonics Technology Letters

Volumn 23, Issue 4, 2011, Pages 215-217

  Pham, S V ^a   Kauppinen, L J ^a   Dijkstra, M ^a   Van Wolferen, H A G M ^a   De Ridder, R M ^a   Hoekstra, H J W M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Cantilever; grated waveguide (GWG); hydrogen sensor; reactive ion etching (RIE); TMAH

Indexed keywords

CANTILEVER; GRATED WAVEGUIDE (GWG); HYDROGEN SENSOR; REACTIVE ION ETCHING (RIE); TMAH;

CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; HYDROGEN; MEMS; MICROELECTROMECHANICAL DEVICES; NANOCANTILEVERS; PALLADIUM; SURFACE ROUGHNESS; WAVEGUIDES;

REACTIVE ION ETCHING;

EID: 79251524569     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2010.2097246     Document Type: Article

References (9)

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