Integration of P(VDF-TrFE) films into strain-based microsystem designs

Smart Materials and Structures

Volumn 20, Issue 8, 2011, Pages

  Röscher, Mark ^a   Scheeren, Johannes ^a   Funke, Benedikt ^a   Böttger, Ulrich ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COURSE OF ACTION; DAMAGE POTENTIAL; DEVICE DESIGN; FUNCTIONAL FILMS; MATERIAL DETERIORATION; PATTERN TRANSFERS; PIEZOELECTRIC ENERGY HARVESTING; POLY(VINYLIDENE FLUORIDE-TRIFLUOROETHYLENE); POLYMERIC MATERIAL; PROCESSING STEPS; PROOF OF CONCEPT;

ENERGY HARVESTING; INTEGRATION; MICROSYSTEMS;

POLYMERIC FILMS;

EID: 79961043159     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/20/8/087001     Document Type: Article

References (29)

1. Roundy S, Wright P K and Rabaey J 2003 A study of low level vibrations as a power source for wireless sensor nodes Comput. Commun. 26 1131-44
2. Pereyma M 2007 Overview of the modern state of the vibration energy harvesting devices MEMSTECH pp107-12
3. Erturk A and Inman D J 2011 Piezoelectric Energy Harvesting 1st edn (New York: Wiley)
4. Cook-Chennault K A, Thambi N and Sastry A M 2008 Powering MEMS portable devices - a review of non-regenerative and regenerative power supply systems with special emphasis on piezoelectric energy harvesting systems Smart Mater. Struct. 17 043001
5. Yan Z and He Q 2011 A review of piezoelectric vibration generator for energy harvesting Appl. Mech. Mater. 44-47 2945-9
6. Jeon Y B, Sood R, Jeong J and Kim S G 2005 MEMS power generator with transverse mode thin film PZT Sensors Actuators A 122 16-22 (Pubitemid 41037282)
7. Choi W J, Jeon Y, Jeong J H, Sood R and Kim S G 2006 Energy harvesting MEMS device based on thin film piezoelectric cantilevers J. Electroceram. 17 543-8
8. Hajati A and Kim S-G 2008 Rectifier-less piezoelectric micro power generator Active and Passive Smart Structures and Integrated Systems Proc. SPIE 6928 69281T
9. Shen D, Park J-H, Ajitsaria J, Choe S-Y, Wikle H C and Kim D-J 2008 The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting J. Micromech. Microeng. 18 055017
10. Cottone F, Vocca H and Gammaitoni L 2009 Nonlinear energy harvesting Phys. Rev. Lett. 102 080601
11. Adhikari S, Friswell M I and Inman D J 2009 Piezoelectric energy harvesting from broadband random vibrations Smart Mater. Struct. 18 115005
12. Erturk A, Hoffmann J and Inman D J 2009 A piezomagnetoelastic structure for broadband vibration energy harvesting Appl. Phys. Lett. 94 254102
13. Marinkovic B and Koser H 2009 Smart sand - a wide bandwidth vibration energy harvesting platform Appl. Phys. Lett. 94 103505
14. Hajati A and Kim S-G 2009 Wide-bandwidth MEMS-scale piezoelectric energy harvester Proc. Power MEMS
15. Dargaville T R, Celina M C, Elliott J M, Chaplya P M, Jones G D, Mowery D M, Assink R A, Clough R L and Martin J W 2005 Characterization, Performance and Optimization of PVDF as a Piezoelectric Film for Advanced Space Mirror Concepts Sandia report SAND2005-6846
16. Furukawa T, Takahashi Y and Nakajima T 2010 Recent advances in ferroelectric polymer thin films for memory applications Curr. Appl. Phys. 10 e62-7
17. Ebnesajjad S 2003 Fluoroplastics vol 2 (Plastics Design Library)
18. Siviour C R, Walley S M, Proud W G and Field J E 2005 The high strain rate compressive behaviour of polycarbonate and polyvinylidene difluoride Polymer 46 546-55 (Pubitemid 41815299)
19. Shen D N, Choe S Y and Kim D J 2007 Analysis of piezoelectric materials for energy harvesting devices under high-g vibrations Japan. J. Appl. Phys. 46 6755-60
20. Manohora H M, Morikawa E, Choi J and Sprunger P T 1999 Pattern transfer by direct photo etching of PVDF using x rays J. Microelectromech. Syst. 8 417-22 (Pubitemid 30552569)
21. Ye Y-H, Jeong D-Y and Zhang Q M 2004 Fabrication of strain tunable infrared frequency selective surfaces on electrostrictive P(VDF-TrFE) copolymer films using a stencil mask method Appl. Phys. Lett. 85 654-6
22. Zhang L, Ducharme S and Li J 2007 Microimprinting and ferroelectric properties of P(VDF-TrFE) copolymer films Appl. Phys. Lett. 91 172906
23. Gallego D, Ferrell N J and Hansford D J 2007 Fabrication of piezoelectric PVDF microstructures by soft lithography for tissue engineering and cell biology applications Mater. Res. Soc. Symp. Proc. 1002
24. Tang Q, Shi S-Q, Huang H and Zhou L M 2004 Fabrication of highly oriented microstructures and nanostructures of ferroelectric P(VDF-TrFE) copolymer via dip-pen nanolithography Superlatt. Microstruct. 36 21-9
25. 3/Pt thin-film stacks for integrated ferroelectric capacitors J. Appl. Phys. 78 1926-33
26. Gerber P, Roelofs A, Lohse O, Kugeler C, Tiedke S, Boettger U and Waser R 2003 Short-time piezoelectric measurements in ferroelectric thin films using a double-beam laser interferometer Rev. Sci. Instrum. 74 2613-5
27. Hasegawa R, Takahashi Y, Chatani Y and Tadokoro H 1972 Crystal structures of three crystalline forms of poly(vinylidene fluoride) Polym. J. 3 600-10
28. Hasegawa R, Kobayashi M and Tadokoro H 1972 Molecular conformation and packing of poly(vinylidene fluoride). Stability of three crystalline forms and the effect of high pressure Polym. J. 3 591-9
29. Gerber P, Boettger U and Waser R 2006 Composition influences on the electrical and electromechanical properties of lead zirconate titanate thin films J. Appl. Phys. 100 124105