Mc3D: A three-dimensional Monte Carlo system simulating image contrast in surface analytical scanning electron microscopy I - Object-oriented software design and tests

Scanning

Volumn 20, Issue 6, 1998, Pages 465-484

  Yan, H ^a,b   El Gomati, M M ^a,b   Prutton, M ^a   Wilkinson, D K ^a   Chu, D P ^a,b   Dowsett, M G ^a,b  

^a UNIVERSITY OF YORK   (United Kingdom)

^b UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

Auger; Monte Carlo; Scanning electron microscope; Simulation

Indexed keywords

ALGORITHM; ARTICLE; AUGER ELECTRON SPECTROSCOPY; COMPUTER PROGRAM; CONTRAST ENHANCEMENT; ELECTRON BEAM; GEOMETRY; PRIORITY JOURNAL; RADIATION SCATTERING; SCANNING ELECTRON MICROSCOPY; SYSTEM ANALYSIS;

EID: 0031739473     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.1998.4950200607     Document Type: Article

References (39)

1. Barkshire IR, Roberts RH, Prutton M: The application of a low energy loss electron detector in conjuction with scanning Auger microscopy: An aid quantitative surface microscopy. Appl Surf Sci 120, 129-138(1997)
2. Briggs D, Seah MP (Eds): Practical Surface Analysis, 2nd ed. John Wiley & Sons Inc., Chichester (1990)
3. Browning R, Eimori T, Traut EP, Chui B, Pease RFW: An elastic cross section model for use with Monte Carlo simulations of low energy electron scattering from high atomic number targets. J Vac Sci Technol B9(6), 3578-3588 (1991)
4. Browning R, Li TZ, Ye J, Pease RFW, Czyzewski Z, Joy DC: Empirical forms for the electron/atom elastic scattering cross sections from 0.1-30keV. J Appl Phys 76,2016-2022 (1994)
5. Chen YF, Kwei CM, Su P: Angular-distribution of electrons elastically backscattered from noncrystalline solid-surfaces. J Phys D: Appl Phys 28,2163-2169 (1995)
6. Cumpson P: Elastic scattering corrections in AES and XPS: I Two rapid Monte Carlo methods for calculating the depth distribution function. Surf Interface Anal 20, 727-741 (1993)
7. Czyzewski Z, MacCallum DO. Romig A, Joy DC: Calculations of Mott scattering cross section. J Appl Phys 68(7), 3066-3072 (1990)
8. El Gomati MM, Prutton M, Lamb B, Tuppen CG: Edge effects and Image contrast in scanning Auger microscopy: A theory/experiment comparison. Surf Interface Anal 11, 251-265 (1988)
9. Fitting HJ, Reinhardt J: Monte Carlo simulations of ke V electron scattering in solid targets. Phys Stat Sol (a) 88,245-259 (1985)
10. Goldstein JI, Newbury DE, Echlin P, Joy DC, Romig AD Jr, Lyman CE, Fiori C, Lifshin E: Scanning Electron Microscopy and X-Ray Microanalysis (2nd edition). Plenum Press (1992)
11. Gryzinski M: Classical theory of atomic collisions. I: Theory of inelastic collisions. Phys Rev 138, A336-345 (1965)
12. Hovington P, Drouin D, Gauvin R: CASINO: A new Monte Carlo code in C language for electron beam interaction - Part I: Description of the program. Scanning 19, 1-14(1997)
13. Jackson AR, El Gomati MM, Matthew JAD, Cumpson PJ: Monte Carlo calculations of the depth distribution function in multilayered structures. Surf Interface Anal 25, 341-351 (1997)
14. Joy DC, Luo S: An empirical stopping power relationship for low-energy electrons. Scanning 11, 176-180(1989)
15. Krivanek OL, Delby N, Gubbens AJ, Kundmann AJ, Leber MI, Ray DA, Trong KV: Advances in parallel-detection EELS. Proc Xllth Int Congr for Electron Microscopy. San Fransisco Press (1990) 2,76
16. Landau RH, Fink Jr. PJ: A Scientist's and Engineer's Guide to Workstations and Supercomputers. John Wiley & Sons Inc., New York (1993)
17. Lowney JR: Use of Monte Carlo modeling for interpreting scanning electron microscope linewidth measurements. Scanning 17, 281-286(1995)
18. Mizuno F, Satoh O: Effects of electron-beam parameters on critical dimension measurements. J Vac Sci Technol B14(6), 4041-4019 (1996)
19. Mott NF, Massey HS: Theory of Atomic Collisions. University Press Oxford, London (1965)
20. Murata K, Matsukawa T, Shimizu R: Monte Carlo calculation of electron scattering in a solid target. Jpn J Appl Phys 10, 678-686 (1971)
21. Powell CJ: Evaluation of formulas for inner shell ionisation. In Use of Monte Carlo Calculations in Electron Probe Microanalysis and Scanning Electron Microscopy (Eds. Heinrich KFJ, Newbury DE, Yakowitz, H). National Bureau of Standards Special Publication 460,97(1976)
22. Press WH, Teukolsky SA, Vetterling WT: Numerical Recipes in C: The Art of Scientific Computing (2nd ed.). University of Cambridge Press (1993)
23. Prutton M, Walker CGH, Greenwood JC, Kenney PG, Dee JC, Barkshire IR, Roberts RH, El Gomati MM: A third generation multispectral Auger microscope. Surf Interface Anal 17, 71-84 ( 1991)
24. Prutton M, Barkshire IR, El Gomati MM, Greenwood JC, Kenny PG, Roberts RH: The use of metal/semiconductor structures to develop MULSAM analytical techiques. Surf Interface Anal 18, 295-302(1992)
25. Reimer L, Stelter D: FORTRAN 77 Monte Carlo program for mini-computers using Mott cross-sections. Scanning 8,265-277 (1986)
26. Reimer L, Kassens M, Wiese L: Monte Carlo simulation program with a free configuration of specimen and detector geometries. Microbeam Nanobeam Anal, Mikrochimica Acta (suppl) 13, 485-492(1996)
27. Romig Jr AD, Plimpton SJ, Myklebust RL, Newbury DE: Application of parallel computing to the Monte Carlo simulation of electron scattering in solids: A rapid method of profile deconvolution. Proc XIIth Int Congr for Electron Microscopy. San Fransisco Press (1990)2,452
28. Schiebl CO, Pfeiffer A, Wagner HW, Wemer WSM, Stippel H: Monte Carlo simulation of electron-scattering for arbitrary 2-D structures using a modified quadtree geometry discretization. Microbeam Nanobeam Anal, Mikrochimica Acra (suppl) 13, 533-544(1996)
29. Scott VD, Love G: Quantitative Electron-Probe Microanalysis. Ellis Horwood Ltd., Chichester (1983)
30. Shimizu R, Ding ZJ: Monte Carlo modeling for mini-computers using Mott cross sections. Rep Prog Phys 55,487-531 (1992)
31. Shimizu R, Everhart TE, MacDonald NC, Hovland CT: Edge effect in high resolution scanning Auger microscopy. Appl Phys Lett 33, 549-551(1978)
32. Soum G, Amal F, Balladore JL, Jouffrey B, Verdier P: Monte Carlo calculations on electron multiple scattering in amorphous or polycrystalline targets. Ultramicroscopy 4(4), 451-( 1979)
33. Tanuma S, Powell CJ, Penn DR: Calculations of electron inelastic mean free paths for 31 materials. Surf Interface Anal 11, 577-589 (1991a)
34. Tanuma S, Powell CJ, Penn DR: Data for 27 elements over the 50-2000 keV range. Surf Interface Anal 17, 911-926(1991b)
35. Tanuma S, Powell CJ, Penn DR: Calculations of electron inelastic mean free paths. Data for 15 inorganic-compounds over the 50-2000 keV range. Surf Interface Anal 17, 927-939 (1991c)
36. Tilinin IS, Jablonski A, Werner WSM: Quantitative surface-analysis by Auger and x-ray photoelectron spectroscopy. Prog Surf Sci 52(4), 193-335(1996)
37. Tuppen CG, Davies GJ: High spatial resolution Auger linescans across heterogeneous chemical edges by Monte Carlo calculation. Surf Interface Anal 7, 235-240 (1985)
38. Umbach A, Hoyer A, Brunger WH: Spatial resolution tests of scan-ning Auger microscopy under different topographical conditions. Surf Interface Anal 14, 401-413 (1989)
39. Wells O: Scanning Electron Microscopy. McGraw-Hill, New York (1972)169