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Volumn 36, Issue 14, 2011, Pages 2668-2670

Electric-field-driven nano-oxidation trimming of silicon microrings and interferometers

Author keywords

[No Author keywords available]

Indexed keywords

HIGH-TEMPERATURE PROCESSING; LINE SHAPE; MICRORING RESONATOR; NANO-OXIDATION; NANOSCALE DISORDER; SILICON MICRORINGS; WAVELENGTH RANGES;

INTERFEROMETERS;

OXIDATION;

EID: 79960541271 PISSN: 01469592 EISSN: 15394794 Source Type: Journal
DOI: 10.1364/OL.36.002668 Document Type: Article

Times cited : (48)

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