Silicon photonics manufacturing

Optics Express

Volumn 18, Issue 23, 2010, Pages 23598-23607

  Zortman, William A ^a   Trotter, Douglas C ^b   Watts, Michael R ^c  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b UNIVERSITY OF NEW MEXICO   (United States)

^c MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIES; MANUFACTURE; NATURAL FREQUENCIES; PHOTONIC DEVICES; PHOTONICS; RESONATORS;

ENVIRONMENTAL VARIATIONS; EXPECTED POWER; FREQUENCY GRIDS; FUNDAMENTAL RESONANCE; MANUFACTURING PROCESS; MICRODISK RESONATORS; MICRODISKS; MULTIPLE DEVICES; NON-UNIFORMITIES; POWER BUDGETS; POWER REQUIREMENT; RESONANT DEVICE; RESONANT FREQUENCIES; SILICON PHOTONICS; SILICON-ON-INSULATORS; SYSTEM APPLICATIONS; THERMAL TUNING; TRANSVERSE ELECTRICS; TRANSVERSE MAGNETIC MODES;

SILICON WAFERS;

EID: 78149448415     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.023598     Document Type: Article

References (22)

1. D.A.B.Miller, "Device Requirements for Optical Interconnects to Silicon Chips," Proc.IEEE 97(7), 1166-1185 (2009).
2. P.M.Kogge, ed., "ExaScale Computing Study: Technology Challenges in Achieving Exascale Systems," Univ.of Notre Dame, CSE Dept.Tech.Report TR-2008-2013, Sept.28, 2008.
3. Q.Xu, B.Schmidt, S.Pradhan, and M.Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435(7040), 325-327 (2005).
4. P.Dong, S.Liao, D.Feng, H.Liang, D.Zheng, R.Shafiiha, C.-C.Kung, W.Qian, G.Li, X.Zheng, A.V.Krishnamoorthy, and M.Asghari, "Low Vpp, ultralow-energy, compact, high-speed silicon electro-optic modulator," Opt. Express 17(25), 22484-22490 (2009).
5. W.A.Zortman, M.R.Watts, D.C.Trotter, R.W.Young, and A.L.Lentine, "Low-Power High-Speed Silicon Microdisk Modulators," (CLEO) CThJ4 San Jose, Ca (2010).
6. M.R.Watts, D.C.Trotter, and R.W.Young, "Maximally Confined High-Speed Second-Order Silicon Microdisk Switches," in Optical Fiber Communication Conference and Exposition and The National Fiber Optic Engineers Conference, OSA Technical Digest (CD) (Optical Society of America, 2008), paper PDP14.
7. B.G.Lee, A.Biberman, J.Chan, and K.Bergman, "High-Performance Modulators and Switches for Silicon Photonic Networks-on-Chip," IEEE J. Sel. Top. Quantum Electron.16(1), 6-22 (2010).
8. A.Biberman, H.L.R.Lira, K.Padmaraju, N.Ophir, M.Lipson, K.Bergman, "Broadband CMOS-Compatible Silicon Photonic Electro-Optic Switch," CLEO CPDA11 (2010).
9. A.Barkai, Y.Chetrit, O.Cohen, R.Cohen, N.Elek, E.Ginsburg, S.Litski, A.Michaeli, O.Raday, D.Rubin, G.Sarid, N.Izhaky, M.Morse, O.Dosunmu, A.Liu, L.Liao, H.Rong, Y.H.Kuo, S.Xu, D.Alduino, J.Tseng, H.F.Liu, and M.Paniccia, "Integrated Silicon Photonics for Optical Networks," J. Opt. Netw.6(1 Issue 1), 25-47 (2007).
10. M.R.Watts, W.A.Zortman, D.C.Trotter, G.N.Nielson, D.L.Luck, R.W.Young, "Adiabatic Resonant Microrings (ARMs) with Directly Integrated Thermal Microphotonics," CLEO CPDB10 (2009).
11. C.T.DeRose, M.R.Watts, D.C.Trotter, D.L.Luck, G.N.Nielson, and R.W.Young, "Silicon Microring Modulator with Integrated Heater and Temperature Sensor for Thermal Control," in Conference on Lasers and Electro-Optics, OSA Technical Digest (CD) (Optical Society of America, 2010), paper CThJ3.
12. P.Dong, S.Liao, D.Feng, H.Liang, R.Shafiiha, N.Feng, G.Li, X.Zheng, A.V.Krishnamoorthy, and M.Asghari, "Tunable High Speed Silicon Microring Modulator," in Conference on Lasers and Electro-Optics, OSA Technical Digest (CD) (Optical Society of America, 2010), paper CThJ5.
13. W.A.Zortman, M.R.Watts, and D.C.Trotter, "Determination of Wafer and Process Induced Resonant Frequency Variation in Silicon Microdisk-Resonators, " in Integrated Photonics and Nanophotonics Research and Applications, OSA Technical Digest (CD) (Optical Society of America, 2009), paper IMC5.
14. M.R.Watts, D.C.Trotter, R.W.Young, and A.L.Lentine, "Ultralow power silicon microdisk modulators and switches," Proceedings of IEEE conference on Group IV Photonics (Institute of Electrical and Electronics Engineers, New York, 2008), pp.4-6, 2008.
15. M.Popovic, "Complex-frequency leaky mode computations using PML boundary layers for dielectric resonant structures," Integrated Photonics Research, Washington, DC, (2003)
16. R.E.Walpole, and R.H.Meyers, Probability and Statistics for Engineers and Scientists, (Macmillan, New York, 1989)
17. Soitec products page: http://www.soitec.com/en/products/soi-products.php
18. International Technology Roadmap for Semiconductors 2009: http://www.itrs.net/Links/2009ITRS/Home2009.htm
19. D.K.Sparacin, C.-Y.Hong, L.C.Kimerling, J.Michel, J.P.Lock, and K.K.Gleason, "Trimming of microring resonators by photooxidation of a plasma-polymerized organosilane cladding material," Opt. Lett.30(17), 2251-2253 (2005).
20. J.E.Cunningham, I.Shubin, X.Zheng, T.Pinguet, A.Mekis, Y.Luo, H.Thacker, G.Li, J.Yao, K.Raj, and A.V.Krishnamoorthy, "Highly-efficient thermally-tuned resonant optical filters," Opt. Express 18(18), 19055-19063 (2010).
21. Y.Zhu, T.E.Müller, and J.A.Lercher, "Single Step Preparation of Novel Hydrophobic Composite Films for Low-k Applications," Adv.Funct.Mater.18(21), 3427-3433 (2008).
22. S.-M.Lee, D.Cahill, and T.Allen, "Thermal conductivity of sputtered oxide film," Phys. Rev.B 52(1), 253-257 (1995).