Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 29, Issue 4, 2011, Pages

  Edlmayr, V ^a   Harzer, T P ^b   Hoffmann, R ^b   Kiener, D ^b   Scheu, C ^b   Mitterer, C ^a  

^a UNIVERSITY OF LEOBEN   (Austria)

^b UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATRICES; AS-GROWN; GRAIN SIZE; GROWTH CONDITIONS; INTERFACE REGIONS; PULSED DIRECT CURRENT; REMAINING LAYERS; THERMAL-ANNEALING; VACUUM-ANNEALING;

AMORPHOUS FILMS; ANNEALING; COATINGS; FILM GROWTH; GRAIN GROWTH; GRAIN SIZE AND SHAPE; ION BOMBARDMENT; MICROSTRUCTURE; TRANSMISSION ELECTRON MICROSCOPY;

ALUMINUM;

EID: 79960494482     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3584803     Document Type: Article

References (38)

1. M. Kathrein, W. Schintlmeister, W. Wallgram, and U. Schleinkofer, Surf. Coat. Technol. 163, 181 (2003).
2. J. Kopac, M. Sokovic, and S. Dolinsek, J. Mater. Process. Technol. 118, 377 (2001).
3. M. J. Buerger, Phase Transformations in Solids (John Wiley Sons, New York, 1951), p. 202.
4. H. P. Rooksby, X-Ray Identification and Crystal Structures of Clay (Mineralogical Society, London, England, 1951), p. 264.
5. H. P. Rooksby and C. J. M. Rooymans, The Formation and Structure of Delta Alumina (Philips Research Laboratories, Eindhoven, Netherlands, 1961), p. 235.
6. W. E. Lee and K. P. D. Lagerlof, J. Electron Microsc. Tech. 2, 247 (1985).
7. B. C. Lippens and J. H. De Boer, Acta Crystallogr. 17, 1312 (1964).
8. R.-S. Zhou and R. L Snyder, Acta Crystallogr. B 47, 617 (1991).
9. I. Levin, A. Berner, C. Scheu, H. Mllejans, and D. G. Brandon, Mikrochim. Acta 15, 93 (1998).
10. K. J. D. MacKenzie, J. Temuujin, M. E. Smith, P. Angerer, and Y. Kameshima, Thermochim. Acta 359, 87 (2000).
11. V. Edlmayr, M. Moser, C. Walter, and C. Mitterer, Surf. Coat. Technol. 204, 1576 (2010).
12. P. Eklund, M. Sridharan, G. Singh, and J. Bottiger, Plasma Processes Polym. 6, 907 (2009).
13. J. Musil, J. Blazek, P. Zeman, S. Proksov, M. Sasek, and R. Cerstv, Appl. Surf. Sci. 257, 1058 (2010).
14. K. Bobzin, N. Bagcivan, A. Reinholdt, and M. Ewering, Surf. Coat. Technol. 205, 1444 (2010).
15. P. Rez, Transmission Electron Energy-Loss Spectrometry in Materials Science, edited by, M. M. Disko, C. C. Ahn, and, B. Fultz, (The Minerals, Metals Materials Society, Warrendale, PA, 1992), p. 107.
16. R. Brydson, H. Sauer, and W. Engel, Transmission Electron Energy-Loss Spectrometry in Materials Science, edited by, M. M. Disko, C. C. Ahn, and, B. Fultz, (The Minerals, Metals Materials Society, Warrendale, PA 1992), p. 131.
17. R. F. Egerton, Electron Energy-Loss Spectroscopy in the Electron Microscope (Plenum, New York, 1996).
18. K.-D. Bouzakis, G. Skordaris, N. Michailidis, I. Mirisidis, G. Erkens, and R. Cremer, Surf. Coat. Technol. 202, 826 (2007).
19. G. G. Stoney, Proc. R. Soc. London 82, 172 (1909).
20. W. D. Nix, Metall. Trans. 20A, 1989 (1989).
21. A. Strecker, U. Salzberger, and J. Mayer, Prakt. Metallogr. 30, 482 (1993).
22. C. Scheu, M. Gao, K. van Benthem, S. Tsukimoto, S. Schmidt, W. Sigle, G. Richter, and J. Thomas, J. Microsc. 210, 16 (2003).
23. J. Bruley, Microsc. Microanal. Microstruct. 4, 23 (1993).
24. C. C. Ahn and O. L. Krivanek, EELS Atlas, ASU HREM, Center for Solid State Science, Arizona State University, Tempe, Arizona and Gatan, Gatan, Warrendale, PA.
25. J. Neidhardt, H. Hgberg, and L. Hultman, Thin Solid Films 478, 34 (2005).
26. J. Neidhardt, S. Mrz, J. M. Schneider, E. Strub, W. Bohne, B. Liedke, W. Mller, and C. Mitterer, J. Appl. Phys. 104, 063304 (2008).
27. H. O. Pierson, Handbook of Chemical Vapor Deposition (CDV), 2nd ed. (Noyes Publications/William Andrew Publishing, LLC, New York, 1999), p. 297.
28. P. Becker, K. Dorenwendt, G. Ebeling, R. Lauer, W. Lucas, R. Probst, H. J. Rademacher, G. Reim, P. Seyfried, and H. Siegert, Phys. Rev. Lett. 46, C6 (1981).
29. I. Petrov, P. B. Barna, L. Hultman, and J. E. Greene, J. Vac. Sci. Technol. 21A, 117 (2003).
30. J. Ramm, M. Ante, T. Bachmann, B. Widrig, H. Brndle, and M. Dbeli, Surf. Coat. Technol. 202, 876 (2007).
31. D. Hochauer, C. Mitterer, M. Penoy, C. Michotte, H. P. Martinz, and M. Kathrein, Surf. Coat. Technol. 203, 350 (2008).
32. J. Bruley, M.-W. Tseng, and D. B. Williams, Microsc. Microanal. Microstruct. 6, 1 (1995).
33. R. Brydson, J. Phys. D 29, 1699 (1996).
34. D. Bouchet and C. Colliex, Ultramicroscopy 96, 139 (2003).
35. K. Lu, Mater. Sci. Eng. R. 16, 161 (1996).
36. S. Reinke, R. Freudenstein, and W. Kulisch, Surf. Coat. Technol. 97, 263 (1997).
37. J. Skogsmo, M. Halvarsson, and S. Vuorinnen, Surf. Coat. Technol. 54, 186 (1992).
38. S. Vuorinen and L. Karlsson, Thin Solid Films 214, 132 (1992).