Multilevel blazed gratings in resonance domain: An alternative to the classical fabrication approach

Optics Express

Volumn 19, Issue 15, 2011, Pages 14735-14745

  Oliva, M ^a   Harzendorf, T ^a   Michaelis, D ^a   Zeitner, U D ^a   Tunnermann A ^a,b  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^b FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM; ELECTRON BEAMS; FABRICATION;

ALIGNMENT ERROR; ALL PHASE; BLAZED GRATING; FIRST ORDER; GRATING PERIODS; MULTI-STEP; NORMAL INCIDENCE; OPTICAL RESPONSE; SELECTIVE ETCHING; STRUCTURAL CHARACTERIZATION; TECHNOLOGICAL METHODS; THREE-LEVEL;

RESONANCE;

EID: 79960479670     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.19.014735     Document Type: Article

References (16)

1. M. B. Fleming and M. C. Hutley, "Blazed diffractive optics," Appl. Opt. 36(20), 4635-4643 (1997). (Pubitemid 127615592)
2. G. J. Swanson, "Binary optics technology: theoretical limits on the diffraction efficiency of multilevel diffractive elements," MIT Tech. rep. 914 (MIT, 1989).
3. O. Sandfuchs, R. Brunner, D. Pätz, S. Sinzinger, and J. Ruoff, "Rigorous analysis of shadowing effects in blazed transmission gratings," Opt. Lett. 31(24), 3638-3640 (2006). (Pubitemid 46079728)
4. S. Astilean, P. Lalanne, P. Chavel, E. Cambril, and H. Launois, "High-efficiency subwavelength diffractive element patterned in a high-refractive-index material for 633 nm," Opt. Lett. 23(7), 552-554 (1998). (Pubitemid 128563788)
5. P. Lalanne, "Waveguiding in blazed-binary diffractive elements," J. Opt. Soc. Am. A 16(10), 2517 (1999).
6. M.-S. L. Lee, P. Lalanne, J.-C. Rodier, and E. Cambril, "Wide-field-angle behavior of blazed-binary gratings in the resonance domain," Opt. Lett. 25(23), 1690-1692 (2000).
7. H. J. Hyvärinen, P. Karvinen, and J. Turunen, "Polarization insensitive resonance-domain blazed binary gratings," Opt. Express 18(13), 13444-13450 (2010).
8. H. Iizuka, N. Engheta, H. Fujikawa, K. Sato, and Y. Takeda, "Role of propagating modes in a double-groove grating with a +1st-order diffraction angle larger than the substrate-air critical angle," Opt. Lett. 35(23), 3973-3975 (2010).
9. E. Noponen, J. Turunen, and A. Vasara, "Parametric optimization of multilevel diffractive optical elements by electromagnetic theory," Appl. Opt. 31(28), 5910-5912 (1992).
10. M. Oliva, D. Michaelis, T. Benkenstein, J. Dunkel, T. Harzendorf, A. Matthes, and U. D. Zeitner, "Highly efficient three-level blazed grating in the resonance domain," Opt. Lett. 35(16), 2774-2776 (2010).
11. M. B. Stern, "Binary optics fabrication," in Microoptics: Elements, Systems and Application, H. P. Herzig, ed. (Taylor & Francis, 1997), pp. 53-85.
12. U. D. Zeitner and E. B. Kley, "Advanced lithography for micro-optics," Proc. SPIE 6290, 629009 (2006).
13. C. David, "Fabrication of stair-case profiles with high aspect ratios for blazed diffractive optical elements," Microelectron. Eng. 53(1-4), 677-680 (2000).
14. M. Kuittinen and J. Turunen, "Mask misalignment in photolithographic fabrication of resonance-domain diffractive elements," Opt. Commun. 142(1-3), 14-18 (1997). (Pubitemid 127399274)
15. U. D. Zeitner, D. Michaelis, E.-B. Kley, and M. Erdmann, "High performance gratings for space applications," Proc. SPIE 7716, 77161K (2010).
16. M. Oliva, T. Benkenstein, J. Dunkel, T. Harzendorf, A. Matthes, D. Michaelis, and U. D. Zeitner, "Smart technology for blazed multilevel gratings in resonance domain," Proc. SPIE 7716, 77161L (2010).