Rigorous analysis of shadowing effects in blazed transmission gratings

Optics Letters

Volumn 31, Issue 24, 2006, Pages 3638-3640

  Sandfuchs, Oliver ^a   Brunner, Robert ^a   Pätz, Daniel ^b   Sinzinger, Stefan ^b   Ruoff, Johannes ^a  

^a CARL ZEISS SMT AG   (Germany)

^b ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION ORDERS; ELECTROMAGNETIC SHADOWING; QUADRATIC DEPENDENCE; SCALAR THEORY;

DIFFRACTION; ELECTROMAGNETISM; OPTICAL DESIGN; OPTICAL SYSTEMS;

DIFFRACTION GRATINGS;

EID: 33846136931     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.31.003638     Document Type: Article

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