Three-level stencil alignment fabrication of a high-k gate stack organic thin film transistor

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 2496-2499

  Cvetkovic, Nenad V ^a   Sidler, Katrin ^a   Savu, Veronica ^a   Brugger, Jürgen ^a   Tsamados, Dimitrios ^a   Ionescu, Adrian M ^a  

^a EPFL   (Switzerland)

Author keywords

Alignment; Diode; Double gate; Flexible; Hafnium oxide; High k; Organic; OTFT; Parilene; Pentacene; Polyimide; Polymer; Stencil; Thin film; Top gate

Indexed keywords

DOUBLE-GATE; FLEXIBLE; HIGH-K; ORGANIC; OTFT; PARILENE; PENTACENES; STENCIL; TOP-GATE;

ALIGNMENT; DIODES; HAFNIUM; HAFNIUM OXIDES; LEAKAGE CURRENTS; MESFET DEVICES; PASSIVATION; PHOTOLITHOGRAPHY; PLATINUM; POLYIMIDES; THIN FILM DEVICES; THIN FILM TRANSISTORS; THIN FILMS; TRANSISTORS; VAPOR DEPOSITION;

ORGANIC FIELD EFFECT TRANSISTORS;

EID: 79960073494     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2010.12.086     Document Type: Conference Paper

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