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Volumn 88, Issue 8, 2011, Pages 2286-2289
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Controlling the size of replicable polydimethylsiloxane (PDMS) molds/stamps using a stepwise thermal shrinkage process
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Author keywords
Mold stamp; Polydimethylsiloxane (PDMS); Thermal shrinkage
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Indexed keywords
CURING PROCESS;
HEAT TREATMENT PROCESS;
HEAT-UP;
HIGHER TEMPERATURES;
MAXIMUM TEMPERATURE;
MICRO PATTERN;
MICROPATTERNS;
MULTI-STEP;
NITROGEN GAS;
PDMS MOLDS;
POLYDIMETHYLSILOXANE (PDMS);
REPLICA-MOLDING PROCESS;
ROOM TEMPERATURE;
SCANNING LASERS;
SHRINKAGE EFFECTS;
SHRINKAGE RATIO;
SMALL VARIATIONS;
STRUCTURE WIDTH;
THERMAL SHRINKAGE;
THREE-DIMENSIONAL SHAPE;
HARDENING;
HEAT TREATMENT;
MICROCHANNELS;
MICROSTRUCTURE;
NITROGEN;
SHRINKAGE;
SURFACE ROUGHNESS;
THREE DIMENSIONAL;
SILICONES;
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EID: 79960061654
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mee.2010.12.005 Document Type: Conference Paper |
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Times cited : (10)
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References (14)
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