Shrinkage ratio of PDMS and its alignment method for the wafer level process

Microsystem Technologies

Volumn 14, Issue 2, 2008, Pages 205-208

  Lee, Seok Woo ^a   Lee, Seung S ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CURING; MICROFABRICATION; SHRINKAGE; SILICON WAFERS;

RIGID SUBSTRATE; WAFER-LEVEL PROCESSING;

POLYDIMETHYLSILOXANE;

EID: 35148865098     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0417-y     Document Type: Article

References (5)

1. Duffy DC, McDonald JC, Schueller OJA, Whitesides GM (1998) Rapid prototyping of microfluidic systems in poly(dimethylsiloxane). Anal Chem 70:4974-4984
2. Go JS, Shoji S (2004) A disposable, dead volume-free and leak-free in-plane PDMS microvalve. Sens Actuators A 114:438-444
3. Kim DS, Lee SW, Kwon TH, Lee SS (2004) A barrier embedded chaotic micromixer. J Micromech Microeng 14:798-805
4. Lee SW, Kim DS, Lee SS, Kwon TH (2006) Split and recombination micromixer fabricated in a PDMS three-dimensional structure. J Micromech Microeng 16:1067
5. McDonald JC, Duffy DC, Anderson JR, Chiu DT, Wu H, Schueller OJA, Whitesides GM (2000) Fabrication of microfluidic systems in poly(dimethylsiloxane). Electrophoresis 21:27-40