Large area direct fabrication of periodic arrays using interference patterning

Physics Procedia

Volumn 12, Issue PART 2, 2011, Pages 214-220

  Lasagni, Andrés F ^a   Roch, Teja ^a,b   Langheinrich, Denise ^a   Bieda, Matthias ^a   Wetzig, Andreas ^a  

^a FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

^b DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Ceramics; Direct Laser Interference Patterning; Metals; Micro and submicrometer fabrication; Polymers

Indexed keywords

CARBON; FABRICATION; MANUFACTURE; METALS; POLYMERS; PULSED LASERS; ULTRAFAST LASERS;

CERAMICS; DIRECT FABRICATIONS; DIRECT LASER INTERFERENCE PATTERNING; FABRICATED STRUCTURES; LASER PROCESSING PARAMETERS; NANOSECOND PULSED LASER; SUBMICROMETERS; THREE-DIMENSIONAL STRUCTURE;

LASER MATERIALS PROCESSING;

EID: 79959455620     PISSN: 18753884     EISSN: 18753892     Source Type: Conference Proceeding    
DOI: 10.1016/j.phpro.2011.03.125     Document Type: Conference Paper

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