Photothermal ablation of polystyrene film by 248 NM excimer laser irradiation: A mechanistic study by time-resolved measurements

Laser Chemistry

Volumn 16, Issue 3, 1996, Pages 167-177

  Tsuboi, Yasuyuki ^a   Sakashita, Shin Ichi ^a   Hatanaka, Koji ^a   Fukumura, Hiroshi ^a   Masuhara, Hiroshi ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Excimer laser ablation; Photothermal mechanism; Polystyrene; Time resolved photography; Time resolved spectroscopy

Indexed keywords

EXCIMER LASERS; FILMS; IRRADIATION; LUMINESCENCE; OPTICAL VARIABLES MEASUREMENT; PHOTOGRAPHY; POLYSTYRENES; PYROLYSIS; SPECTROSCOPY; TEMPERATURE;

EFFECTIVE ABSORPTION COEFFICIENT; ETCH DEPTH MEASUREMENT; PHOTOTHERMAL PROCESS; TIME RESOLVED PHOTOGRAPHY; TIME RESOLVED SPECTROSCOPY; TRANSMISSION MEASUREMENT;

LASER ABLATION;

EID: 0029779974     PISSN: 02786273     EISSN: None     Source Type: Journal    
DOI: 10.1155/1996/17451     Document Type: Article

References (44)

1. R. Srinivasan and W. J. Leigh. J. Am. Chem. Soc., 104, 6784 (1982).
2. Y. Kawamura, K. Toyoda and S. Namba. Appl. Phys. Lett., 40, 374 (1982).
3. R. Srinivasan, B. Braren, R. W. Dreyfus, L. Hadel and D. E. Seeger. J. Opt. Soc. Am., B3, 785 (1986).
4. M. Bolle, K. Luther, J. Troe, J. Ihlemann and H. Gerhardt. Appl. Surf. Sci., 46, 279 (1990).
5. H. Hiraoka, T. J. Chuang and H. Masuhara. J. Vac. Sci. Technol., B6, 463 (1988).
6. T. J. Chuang, H. Hiraoka and A. Modi. Appl. Phys., A45, 277 (1988).
7. R. Srinivasan, B. Braren and K. G. Gasey. J. Appl. Phys., 68, 1842 (1990).
8. G. Koren and J. T. C. Yeh. J. Appl. Phys., 56, 2120 (1984).
9. J. H. Brannon, J. R. Lankard, A. I. Baise, F. Burns and J. Kaufman. J. Appl. Phys., 58, 2036 (1985).
10. R. Srinivasan, B. Braren and R. W. Dreyfus. J. Appl. Phys., 61, 372 (1987).
11. R. Srinivasan and W J Leigh. J. Am. Chem. Soc., 104, 6784 (1982).
12. J. B. Birks. Photophysics of Aromatic Molecules, Wiley, London (1970).
13. Y. Tsuboi, H. Hatanaka, H Fukumura and H. Masuhara. J. Phys. Chem., 98, 11237 (1994).
14. H. Masuhara, H. Hiraoka and E. E. Mannero. Macromolecules, 20, 450 (1987).
15. H. Fujiwara, H. Fukumura and H. Masuhara. J. Phys. Chem., 99, 11844 (1995).
16. H. Fukumura and H. Masuhara Chem. Phys. Lett., 221, 373 (1994).
17. H. Fujiwara, H. Fukumura and H. Masuhara. Appl. Phys. Lett., 64, 2451 (1994).
18. Y. Tsuboi, H. Fukumura and H. Masuhara. Appl Phys. Lett., 64, 2745 (1994).
19. H. Masuhara, S. Eura, H. Fukumura and A. Itaya. Chem. Phys. Lett., 156, 446 (1989); H. Masuhara, A. Itaya and H. Fukumura. ACS Symp. Ser., 412, 400 "Molecular Studies on Laser Ablation Processes of Polymeric Materials by Time-Resolved Luminescence Spectroscopy" (1989); H. Fukumura and H. Masuhara. J. Photopolym. Sci. Technol., 5, 223 (1992).
20. H. Masuhara, S. Eura, H. Fukumura and A. Itaya. Chem. Phys. Lett., 156, 446 (1989); H. Masuhara, A. Itaya and H. Fukumura. ACS Symp. Ser., 412, 400 "Molecular Studies on Laser Ablation Processes of Polymeric Materials by Time-Resolved Luminescence Spectroscopy" (1989); H. Fukumura and H. Masuhara. J. Photopolym. Sci. Technol., 5, 223 (1992).
21. H. Masuhara, S. Eura, H. Fukumura and A. Itaya. Chem. Phys. Lett., 156, 446 (1989); H. Masuhara, A. Itaya and H. Fukumura. ACS Symp. Ser., 412, 400 "Molecular Studies on Laser Ablation Processes of Polymeric Materials by Time-Resolved Luminescence Spectroscopy" (1989); H. Fukumura and H. Masuhara. J. Photopolym. Sci. Technol., 5, 223 (1992).
22. H. Masuhara, S. Eura, H. Fukumura and A. Itaya. Chem. Phys. Lett., 156, 446 (1989); H. Masuhara, A. Itaya and H. Fukumura. ACS Symp. Ser., 412, 400 "Molecular Studies on Laser Ablation Processes of Polymeric Materials by Time-Resolved Luminescence Spectroscopy" (1989); H. Fukumura and H. Masuhara. J. Photopolym. Sci. Technol., 5, 223 (1992).
23. G. Koren. Appl. Phys. Lett., 50, 1030 (1987).
24. G. H. Pettit and R. Sauerbrey. Appl. Phys. Lett., 58, 793 (1991).
25. R. Srinivasan, B. Braren, K. G. Casey and M. yeh. Appl. Phys. Lett., 55, 2790 (1989).
26. H. Fukumura, E. Takahashi and H. Masuhara. J. Phys. Chem., 99, 750 (1995).
27. D. E. Hare and D. D. Dlott. Appl. Phys. Lett., 64, 715 (1994).
28. R. Larciprete and M. Stuke. Appl. Phys., B42, 181 (1987).
29. P. Lemoine, W. Blau, A. Drury and C. Keely. Polymer, 34, 5020 (1993).
30. X. Wen, D. E. Hare and D. D. Dlott. Appl. Phys. Lett., 64, 184 (1994).
31. H. Fukumura, N. Mibuka, S. Eura and H. Masuhara. Appl. Phys., A53, 255 (1991).
32. J. Brandrup and E. H. Immergut. Polymer Handbook Third Edition. V/82, John Wiley & Sons, Inc. (1989).
33. S. L. Madorsky and S. Strauss. J. Research of National Bureau of Standards, 40, 417 (1948).
34. J. Brandrup and E. H. Immergut. Polymer Handbook Third Edition. 11/372, John Wiley & Sons, Inc. (1989).
35. I. B. Berlman Handbook of Fluorescence Spectra of Aromatic Molecules, Academic Press, New York (1971).
36. H. Miyasaka, F. Ikejiri and N Mataga. Chem. Phys. Lett., 202, 419 (1993).
37. H. Masuhara, S. Ohwada, Y. Seki, N. Mataga, K. Sato and S. Tazuke. Photochem. Photobiol., 32, 9 (1980).
38. H. Miyasaka, F. Ikejiri and N. Mataga. J. Phys. Chem., 92, 249 (1988).
39. R. W. B. Pearse and A. G. Gaydon. The Identification of Molecular Spectra, Wiley, London (1976).
40. H. Fukumura, N. Mibuka, S. Eura, H. Masuhara and N. Nishi. J. Phys. Chem., 97, 13761 (1993).
41. S. Lazare and V. Granier. J. Appl. Phys., 63, 2110 (1988).
42. P. E. Dyer and R. Srinivasan. J. Appl. Phys., 66, 2608 (1989).
43. G. Paraskevopoulos, D. L. Singleton, R. S. Irwin and R. S. Taylor. J. Appl. Phys., 70, 1938 (1991).
44. M Tsunekawa, S. Nishio and H. Sato. Jpn. J. Appl. Phys., 34, 218 (1995).