Near-ultraviolet absorption and nanosecond-pulse-laser damage in HfO 2 monolayers studied by submicrometer-resolution photothermal heterodyne imaging and atomic force microscopy

Journal of Applied Physics

Volumn 109, Issue 11, 2011, Pages

  Papernov, S ^a   Tait, A ^a   Bittle, W ^a   Schmid, A W ^a   Oliver, J B ^a   Kupinski, P ^a  

^a UNIVERSITY OF ROCHESTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DAMAGE MORPHOLOGY; EXPERIMENTAL EVIDENCE; HAFNIUM DIOXIDE; HIGH-INDEX; LASER-INDUCED DAMAGE; MULTI-LAYER-COATING; NANO SCALE; PHOTOTHERMAL HETERODYNE IMAGING; SMALL SIZE;

ABSORPTION; ATOMIC FORCE MICROSCOPY; DEFECTS; FILM PREPARATION; HAFNIUM; HAFNIUM OXIDES; HETERODYNING; IMAGING TECHNIQUES; LASER DAMAGE; MONOLAYERS; MORPHOLOGY; ULTRAVIOLET LASERS;

PULSED LASERS;

EID: 79959396794     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3594713     Document Type: Article

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