Study of luminescent defects in hafnia thin films made with different deposition techniques

Journal of Luminescence

Volumn 129, Issue 12, 2009, Pages 1786-1789

  Ciapponi, Alessandra ^a   Wagner, Frank R ^a   Palmier, Stéphanie ^a   Natoli, Jean Yves ^a   Gallais, Laurent ^a  

^a AIX MARSEILLE UNIVERSITÉ   (France)

Author keywords

Crystallinity; HfO2; Laser damage; Luminescence; Optical applications; Thin film

Indexed keywords

DEPOSITION; HAFNIUM OXIDES; LASER DAMAGE; LIGHT; LUMINESCENCE; NONDESTRUCTIVE EXAMINATION; OPTICAL COATINGS; PHOTOLUMINESCENCE; THIN FILMS;

CRYSTALLINITIES; DEPOSITION TECHNIQUE; HFO2; NONDESTRUCTIVE CHARACTERIZATION; OPTICAL APPLICATIONS; PHOTOLUMINESCENCE SPECTRUM; PHOTOTHERMAL DEFLECTIONS; THIN-FILM DEPOSITION TECHNIQUE;

OPTICAL FILMS;

EID: 70349917827     PISSN: 00222313     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jlumin.2009.02.026     Document Type: Article

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