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Volumn 257, Issue 20, 2011, Pages 8696-8701

The effect of geometry and post-annealing on surface acoustic wave characteristics of AlN thin films prepared by magnetron sputtering

(2) Phan, Duy Thach a Chung, Gwiy Sang a

a University of Ulsan (South Korea)

Author keywords

AlN films; Geometry; Post annealing; SAW resonator

Indexed keywords

ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ALUMINUM NITRIDE; ANNEALING; GEOMETRY; III-V SEMICONDUCTORS; INSERTION LOSSES; MAGNETRON SPUTTERING; ULTRASONIC TRANSDUCERS;

ALN FILMS; INTERDIGITAL TRANSDUCER; POLYCRYSTALLINE ALUMINUM; POST ANNEALING; POSTDEPOSITION HEAT TREATMENT; REACTIVE MAGNETRON SPUTTERING; SAW RESONATORS; SURFACE ACOUSTIC WAVE (SAW);

THIN FILMS;

EID: 79959368686 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2011.05.050 Document Type: Article

Times cited : (27)

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