Dimensionality reduction methods in virtual metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6922, Issue , 2008, Pages

  Zeng, Dekong ^a   Tan, Yajing ^a   Spanos, Costas J ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Advanced process control; Clustering; Genetic algorithm; Neural networks; PCR; PLS; Statistical modeling; Virtual metrology

Indexed keywords

ADVANCED PROCESS CONTROL; CLUSTERING; PCR; PLS; STATISTICAL MODELING; VIRTUAL METROLOGY;

CLUSTERING ALGORITHMS; INTELLIGENT CONTROL; MEASUREMENTS; MODELS; NEURAL NETWORKS; PRINCIPAL COMPONENT ANALYSIS; UNITS OF MEASUREMENT; USER INTERFACES;

PROCESS CONTROL;

EID: 79959354633     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.772739     Document Type: Conference Paper

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