The economic impact of choosing off-line, inline or insitu metrology deployment in semiconductor manufacturing

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 2001, Pages 37-40

  Spanos, C J ^a   Jula, P ^a   Leachman, R C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COST BENEFIT ANALYSIS; ECONOMIC AND SOCIAL EFFECTS; IN SITU PROCESSING; MATHEMATICAL MODELS; MONTE CARLO METHODS;

ECONOMIC MODELS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0035175140     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)