Fabrication of ordered silicon nanopillars and nanowires by self-assembly and metal-assisted etching

Physica Status Solidi (A) Applications and Materials Science

Volumn 208, Issue 6, 2011, Pages 1412-1416

  Boarino, Luca ^a   Imbraguglio, Dario ^a   Enrico, Emanuele ^a   De Leo, Natascia ^a   Celegato, Federica ^a   Tiberto, Paola ^a   Pugno, Nicola ^b   Amato, Giampiero ^a  

^a ISTITUTO NAZIONALE DI RICERCA METROLOGICA   (Italy)

^b POLITECNICO DI TORINO   (Italy)

Author keywords

metal assisted etching; nanopillars; nanowires; self assembly; silicon

Indexed keywords

DEPOSITION CONDITIONS; DEPOSITION METHODS; ETCHING SOLUTIONS; METAL-ASSISTED ETCHING; NANOPILLARS; REGULAR DISTRIBUTION; SILICON NANOSTRUCTURES; SILICON NANOWIRES; SILICON SUBSTRATES; SILVER THIN FILMS; SPUTTER-ETCHING;

GOLD DEPOSITS; NANOWIRES; POLYSTYRENES; SELF ASSEMBLY; SILVER; THERMAL EVAPORATION; THIN FILMS; VAPOR DEPOSITION;

ETCHING;

EID: 79959213445     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.201000182     Document Type: Article

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