Laser-textured silicon photodiode with broadband spectral response

Applied Optics

Volumn 50, Issue 17, 2011, Pages 2508-2511

  Li, Zhi ^a   Nayak, Barada K ^a   Iyengar, Vikram V ^a   McIntosh, Dion ^a   Zhou, Qiugui ^a   Gupta, Mool C ^a   Campbell, Joe C ^a  

^a University of Virginia   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; EFFICIENCY; PHOTODIODES;

LASER-TEXTURED; OPTICAL RESPONSE; SI PHOTODIODES; SILICON PHOTODIODE; SPECTRAL RESPONSE;

QUANTUM EFFICIENCY;

EID: 79958841094     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.50.002508     Document Type: Article

References (15)

1. D. J. Frank, Y. Taur, and H.-S. Philip Wong, in 57th Annual Device Research Conference Digest (IEEE, 1999), pp. 18-21.
2. T. H. Ning, in IEEE Region 10 International Conf. on Microelectronics and VLSI, Asia-Pacific Microelectronics 2000 (IEEE, 1995), pp. 1-4.
3. I. Khodami, F. Taghibakhsh, and K. S. Karim, IEEE Electron Device Lett. 29, 1007-1008 (2008).
4. A. Osinsky, S. Gangopadhyay, J. W. Yang, R. Gaska, D. Kuksenkov, H. Temkin, I. K. Shmagin, Y. C. Chang, J. F. Muth, and R. M. Kolbas, "Visible-blind GaN Schottky barrier detectors grown on Si (111)," Appl. Phys. Lett. 72, 551-553 (1998). (Pubitemid 128671237)
5. P. Mandracci, M. L. Rastello, P. Rava, F. Giuliani, and F. Giorgis, "Stability and quantum efficiency of a novel type of a-Si:H/a-SiC:H based UV detector," Thin Solid Films 337, 232-234 (1999). (Pubitemid 129604473)
6. C.-H. Lin, C.-Y. Yu, C.-Y. Peng,W. S. Ho, and C.W. Liu, "Broadband SiGe/Si quantum dot IR photodetectors," J. Appl. Phys. 101, 033117 (2007).
7. J. Zhao, A. Wang, P. Campbell, and M. A. Green, "22.7% efficient silicon photovoltaic modules with textured front surface," IEEE Trans. Electron Devices 46, 1495-1497 (1999).
8. M.A. Green, "The path to 25% silicon solar cell efficiency: History of silicon cell evolution," Prog. Photovoltaics 17, 183-189 (2009).
9. E. Manea, E. Budianu, M. Purica, D. Cristea, I. Cernica, R. Muller, V. Moagar Poladian, "Optimization of front surface texturing processes for high-efficiency silicon solar cells," Solar Energy Mater. Sol. Cells 87, 423-431 (2005). (Pubitemid 40556589)
10. E. Yablonovitch and G. D. Cody, "Intensity enhancement in textured optical sheets for solar cells," IEEE Trans. Electron Devices 29, 300-305 (1982). (Pubitemid 12477090)
11. Z. Huang, J. E. Carey, M. Liu, X. Guo, E. Mazur, and J. C. Campbell, "Microstructured silicon photodetector," Appl. Phys. Lett. 89, 033506 (2006).
12. K. Yamamoto, A. Sakamoto, T. Nagano, and K. Fukumitsu, "NIR sensitivity enhancement by laser treatment for Si detectors," Nucl. Instr. and Meth. A, Nucl. Instrum. Methods. Phys. Res. A 624, 520-523 (2010).
13. M. M. Heyns, T. Bearda, I. Cornelissen, S. De Gendt, R. Degraeve, G. Groeseneken, C. Kenens, D. M. Knotter, L. M. Loewenstein, P. Mertens, S. Mertens, M. Meuris, T. Nigam, M. Schaekers, I. Teerlinck, W. Vandervorst, R. Vos, and K.Wolke, "Cost-effective cleaning and high quality thin gate oxides," IBM J. Res. Dev. 43, 339 (1999).
14. B. K. Nayak, V. V. Iyengar, and M. C. Gupta, "Efficient light trapping in silicon solar cells by ultrafast-laser-induced self-assembled micro/nano structures," Prog. Photovoltaics (to be published).
15. S. Adachi, Optical Constants of Crystalline and Amorphous Semiconductors-Numerical Data and Graphical Information (Kluwer, 1999).