Future prospects for Si CMOS technology

Annual Device Research Conference Digest

Volumn , Issue , 1999, Pages 18-21

  Frank, David J ^a   Taur, Yuan ^a   Wong, Hon Sum Philip ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONICS INDUSTRY; SEMICONDUCTING SILICON;

SHALLOW TRENCH ISOLATION (STI);

CMOS INTEGRATED CIRCUITS;

EID: 0033362930     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (8)