Optimization of organized silicon nanowires growth inside porous anodic alumina template using hot wire chemical vapor deposition process

Thin Solid Films

Volumn 519, Issue 14, 2011, Pages 4603-4608

  Lefeuvre, E ^a   Kim, K H ^a   He, Z B ^a   Maurice, J L ^a   Chatelet M ^a   Pribat, D ^b   Cojocaru, C S ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^b Sungkyunkwan University   (South Korea)

Author keywords

Hot wire CVD; PAA; Porous alumina; Silicon nanowires

Indexed keywords

AMORPHOUS SILICON (A-SI); ATOMIC HYDROGEN; HIGH-DENSITY ARRAYS; HOT WIRE CHEMICAL VAPOR DEPOSITION; HOT WIRE CVD; HOT WIRES; LI-ION BATTERIES; PAA; POROUS ALUMINA; POROUS ANODIC ALUMINA TEMPLATE; POROUS MEMBRANES; SILICON NANOWIRES;

ALUMINUM SHEET; CHEMICAL VAPOR DEPOSITION; DEPOSITS; NANOWIRES; OPTIMIZATION; POROUS SILICON; SILICON; TUNGSTEN; WIRE;

AMORPHOUS SILICON;

EID: 79958823894     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.01.333     Document Type: Conference Paper

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