Nanometer-scale displacement sensor based on phase-sensitive diffraction grating

Applied Optics

Volumn 50, Issue 10, 2011, Pages 1413-1416

  Zhao, Shuangshuang ^a   Hou, Changlun ^a   Bai, Jian ^a   Yang, Guoguang ^a   Tian, Feng ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION; ELECTROMAGNETIC PULSE; LIGHT SOURCES;

DIFFERENTIAL CIRCUITS; DISPLACEMENT SENSOR; HIGH SENSITIVITY; INTERFEROMETERIC; MICRO-STEPPING; MOTOR CONTROLLERS; NANO-METER SCALE; PHASE SENSITIVE;

DIFFRACTION GRATINGS;

EID: 79958704553     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.50.001413     Document Type: Article

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