Numerical simulation methods for electron and ion optics

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 645, Issue 1, 2011, Pages 266-272

  Munro, Eric ^a  

^a Munro's Electron Beam Software Ltd   (United Kingdom)

Author keywords

Aberrations; CAD software; Electron optics; Field computation; Ray tracing; Simulation methods

Indexed keywords

ABERRATION CORRECTORS; CAD SOFTWARE; DIFFERENTIAL ALGEBRAS; ELECTRON MIRRORS; FIELD COMPUTATION; IMAGING ENERGY FILTERS; ION BEAM OPTICS; ION OPTICS; MULTIPOLES; NUMERICAL SIMULATION METHOD; PARAXIAL; SIMULATION EXAMPLE; SIMULATION METHODS; SPACE CHARGE EFFECTS; TOLERANCING; WAVE OPTICAL SIMULATION; WIEN FILTERS;

COMPUTER AIDED DESIGN; COMPUTER SOFTWARE; ELECTRONS; ION SOURCES; IONS; NUMERICAL METHODS; OPTICAL PROPERTIES; OPTICS;

COMPUTER SIMULATION;

EID: 79958189560     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2010.11.181     Document Type: Conference Paper

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