Aberration analysis of electron mirrors by a differential algebraic method

Optik

Volumn 119, Issue 2, 2008, Pages 90-96

  Wang, Liping ^a   Rouse, John ^a   Munro, Eric ^a   Liu, Haoning ^a   Zhu, Xieqing ^a  

^a Munro's Electron Beam Software Ltd   (United Kingdom)

Author keywords

Aberration correction; Differential algebra; Electron mirror; Electron optics

Indexed keywords

ELECTRON MOBILITY; ELECTRON OPTICS; MAGNETIC FIELDS; SOFTWARE PACKAGES;

CONVENTIONAL LENS; DIFFERENTIAL ALGEBRAIC METHOD; ELECTRON MIRRORS;

ABERRATIONS;

EID: 37549000215     PISSN: 00304026     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijleo.2006.06.013     Document Type: Article

References (12)

1. Feng J., Forest E., MacDowell A.A., et al. An X-ray photoemission electron microscope using electron mirror aberration corrector for the study of complex materials. J. Phys.: Condens Matter 17 (2005) S1339-S1350
2. Bauer E. LEEM basics. Surf. Rev. Lett. 5 (1998) 275-1286
3. Kelman V.M., Sekunova L.M., and Yakushev E.M. Sov. Phys. Tech. Phys. 18 (1974) 1142, 1799, 1809
4. Rose H., and Preikszas D. Time-dependent perturbation formalism for calculating the aberrations of systems with large ray gradients. Nucl. Instrum. Methods-Phys. Res. A 363 (1995) 301-315
5. Preikszas D., and Rose H. Correction properties of electron mirrors. J. Electron Microsc. 46 1 (1997) 1-9
6. Wan W., Feng J., Padmore H.A., et al. Simulation of a mirror corrector for PEEM3. Nucl. Instrum. Methods-Phys. Res. A 519 (2004) 222-229
7. Berz M. Differential algebraic description of beam dynamics to very high orders. Particle Accelerators 24 (1989) 109-124
8. Wang L.-P., Rouse J., Liu H., Munro E., and Zhu X. Simulation of electron optical systems by differential algebraic method combined with Hermite fitting for practical lens fields. Microelectron. Eng. 73-74 (2004) 90-96
9. Wang L.-P., Tang T.-T., and Cheng B.-J. Differential algebraic theory and method for arbitrary high order aberrations of electron optics. Optik 111 (2000) 285-289
10. E. Munro, X. Zhu, J. Rouse, H. Liu, A study of ways of improving the speed and accuracy of computing fields, trajectories and aberrations in electron optics, in: Proceedings of the Sixth Seminar on "Recent Trends in Charged Particle Optics and Surface Physics Instrumentation", Skalsky Dvur. ISI Brno, 1998.
11. Liu H., Munro E., Rouse J., and Zhu X. Simulation methods for multipole imaging systems and aberration correctors. Ultramicroscopy 93 (2002) 271-291
12. SOFEM User Manual v.1.6, MEBS Ltd., London, 2002.