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Volumn 519, Issue 18, 2011, Pages 6190-6195
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Characterisation of nano-structured titanium and aluminium nitride coatings by indentation, transmission electron microscopy and electron energy loss spectroscopy
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Author keywords
Electron energy loss near edge structure; Finite element modelling; Indentation; Nitride films; Transmission electron microscopy
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Indexed keywords
AL CONTENT;
ALN FILMS;
CHARACTERISATION;
COMPOSITION RANGES;
CROSS-SECTION IMAGES;
DAMAGE BEHAVIOUR;
DEPOSITION PARAMETERS;
ELECTRON ENERGY LOSS NEAR EDGE STRUCTURE;
ELECTRON ENERGY LOSS SPECTRUM;
FINITE ELEMENT MODELLING;
GROWTH MODES;
INDENTATION TEST;
LATTICE SYMMETRY;
LOCAL ENVIRONMENTS;
LOW STRESS;
NANO-STRUCTURED;
NITRIDE FILMS;
NITROGEN ATOM;
RADIOFREQUENCY MAGNETRONS;
SMALL GRAINS;
STEEL SUBSTRATE;
TIN AND TI;
TRANSMISSION ELECTRON;
VICKERS;
VICKERS INDENTATION;
ALUMINUM;
ALUMINUM COMPOUNDS;
ATOMIC SPECTROSCOPY;
DISSOCIATION;
ELECTRON ENERGY LEVELS;
ELECTRONS;
ENERGY DISSIPATION;
GRAIN BOUNDARIES;
MAGNETRONS;
METALLIC FILMS;
NANOSTRUCTURES;
PROTECTIVE COATINGS;
TITANIUM;
TITANIUM NITRIDE;
TRANSMISSION ELECTRON MICROSCOPY;
ELECTRON ENERGY LOSS SPECTROSCOPY;
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EID: 79958170346
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2011.04.113 Document Type: Article |
Times cited : (21)
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References (25)
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