Fast and simple specimen preparation for TEM studies of oxide films deposited on silicon wafers

Microscopy and Microanalysis

Volumn 15, Issue 1, 2009, Pages 15-19

  Teodorescu, Valentin S ^a   Blanchin, Marie Genevieve ^b  

^a NATIONAL INSTITUTE OF MATERIALS PHYSICS   (Romania)

^b UNIVERSITÉ LYON 1   (France)

Author keywords

HfO; Specimen preparation; Thin films; Transmission electron microscopy

Indexed keywords

EID: 67649194511     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927609090011     Document Type: Article

References (6)

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